5/30/2012	9:06:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2012	9:06:13 AM	Recipe started at 9:06 AM
5/30/2012	9:06:13 AM	Helium valve closed
5/30/2012	9:06:13 AM	H2 valve closed
5/30/2012	9:06:13 AM	BCl3 valve closed
5/30/2012	9:06:13 AM	PH3 valve closed
5/30/2012	9:06:13 AM	SiCl4 pre valve closed
5/30/2012	9:06:13 AM	SiCl4 post valve closed
5/30/2012	9:06:13 AM	Main Vac valve closed
5/30/2012	9:06:13 AM	Bypass valve closed
5/30/2012	9:06:13 AM	Bubbler valve closed
5/30/2012	9:06:13 AM	Helium MFC set to  0.000000
5/30/2012	9:06:13 AM	H2 MFC set to  0.000000
5/30/2012	9:06:13 AM	BCl3 MFC set to  0.000000
5/30/2012	9:06:13 AM	PH3 MFC set to  0.000000
5/30/2012	9:06:13 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:06:13 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:06:13 AM	Tube furnace set to 0
5/30/2012	9:06:16 AM	H2 valve closed
5/30/2012	9:06:16 AM	BCl3 valve closed
5/30/2012	9:06:16 AM	PH3 valve closed
5/30/2012	9:06:16 AM	SiCl4 pre valve closed
5/30/2012	9:06:16 AM	SiCl4 post valve closed
5/30/2012	9:06:16 AM	Main Vac valve closed
5/30/2012	9:06:16 AM	Bypass valve closed
5/30/2012	9:06:16 AM	Bubbler valve closed
5/30/2012	9:06:16 AM	Helium valve opened
5/30/2012	9:06:16 AM	Helium MFC set to  500.000000
5/30/2012	9:06:16 AM	H2 MFC set to  0.000000
5/30/2012	9:06:16 AM	BCl3 MFC set to  0.000000
5/30/2012	9:06:16 AM	PH3 MFC set to  0.000000
5/30/2012	9:06:16 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:06:16 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:06:16 AM	Tube furnace set to 0
5/30/2012	9:07:29 AM	Helium valve closed
5/30/2012	9:07:29 AM	H2 valve closed
5/30/2012	9:07:29 AM	BCl3 valve closed
5/30/2012	9:07:29 AM	PH3 valve closed
5/30/2012	9:07:29 AM	SiCl4 pre valve closed
5/30/2012	9:07:29 AM	SiCl4 post valve closed
5/30/2012	9:07:29 AM	Main Vac valve closed
5/30/2012	9:07:29 AM	Bypass valve closed
5/30/2012	9:07:29 AM	Bubbler valve closed
5/30/2012	9:07:29 AM	Helium MFC set to  0.000000
5/30/2012	9:07:29 AM	H2 MFC set to  0.000000
5/30/2012	9:07:29 AM	BCl3 MFC set to  0.000000
5/30/2012	9:07:29 AM	PH3 MFC set to  0.000000
5/30/2012	9:07:29 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:07:29 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:07:29 AM	Tube furnace set to 0
5/30/2012	9:07:30 AM	Run finished at 9:07 AM
5/30/2012	9:07:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2012	9:21:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2012	9:21:03 AM	Recipe started at 9:21 AM
5/30/2012	9:21:03 AM	Helium valve closed
5/30/2012	9:21:03 AM	H2 valve closed
5/30/2012	9:21:03 AM	BCl3 valve closed
5/30/2012	9:21:03 AM	PH3 valve closed
5/30/2012	9:21:03 AM	SiCl4 pre valve closed
5/30/2012	9:21:03 AM	SiCl4 post valve closed
5/30/2012	9:21:03 AM	Main Vac valve closed
5/30/2012	9:21:03 AM	Bubbler valve closed
5/30/2012	9:21:03 AM	Bypass valve opened
5/30/2012	9:21:03 AM	Helium MFC set to  0.000000
5/30/2012	9:21:03 AM	H2 MFC set to  0.000000
5/30/2012	9:21:03 AM	BCl3 MFC set to  0.000000
5/30/2012	9:21:03 AM	PH3 MFC set to  0.000000
5/30/2012	9:21:03 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:21:03 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:21:03 AM	Tube furnace set to 0
5/30/2012	9:22:19 AM	Helium valve closed
5/30/2012	9:22:19 AM	H2 valve closed
5/30/2012	9:22:19 AM	BCl3 valve closed
5/30/2012	9:22:19 AM	PH3 valve closed
5/30/2012	9:22:19 AM	SiCl4 pre valve closed
5/30/2012	9:22:19 AM	SiCl4 post valve closed
5/30/2012	9:22:19 AM	Main Vac valve closed
5/30/2012	9:22:19 AM	Bubbler valve closed
5/30/2012	9:22:19 AM	Bypass valve opened
5/30/2012	9:22:19 AM	Helium MFC set to  0.000000
5/30/2012	9:22:19 AM	H2 MFC set to  0.000000
5/30/2012	9:22:19 AM	BCl3 MFC set to  0.000000
5/30/2012	9:22:19 AM	PH3 MFC set to  0.000000
5/30/2012	9:22:19 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:22:19 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:22:19 AM	Tube furnace set to 0
5/30/2012	9:23:19 AM	Helium valve closed
5/30/2012	9:23:19 AM	H2 valve closed
5/30/2012	9:23:19 AM	BCl3 valve closed
5/30/2012	9:23:19 AM	PH3 valve closed
5/30/2012	9:23:19 AM	SiCl4 pre valve closed
5/30/2012	9:23:19 AM	SiCl4 post valve closed
5/30/2012	9:23:19 AM	Bypass valve closed
5/30/2012	9:23:19 AM	Bubbler valve closed
5/30/2012	9:23:19 AM	Main Vac valve opened
5/30/2012	9:23:19 AM	Helium MFC set to  0.000000
5/30/2012	9:23:19 AM	H2 MFC set to  0.000000
5/30/2012	9:23:19 AM	BCl3 MFC set to  0.000000
5/30/2012	9:23:19 AM	PH3 MFC set to  0.000000
5/30/2012	9:23:19 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:23:19 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:23:19 AM	Tube furnace set to 0
5/30/2012	9:23:20 AM	Run finished at 9:23 AM
5/30/2012	9:23:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2012	9:24:00 AM	Recipe started at 9:23 AM
5/30/2012	9:24:00 AM	Helium valve closed
5/30/2012	9:24:00 AM	H2 valve closed
5/30/2012	9:24:00 AM	BCl3 valve closed
5/30/2012	9:24:00 AM	PH3 valve closed
5/30/2012	9:24:00 AM	SiCl4 pre valve closed
5/30/2012	9:24:00 AM	SiCl4 post valve closed
5/30/2012	9:24:00 AM	Main Vac valve closed
5/30/2012	9:24:00 AM	Bypass valve closed
5/30/2012	9:24:00 AM	Bubbler valve closed
5/30/2012	9:24:00 AM	Helium MFC set to  0.000000
5/30/2012	9:24:00 AM	H2 MFC set to  0.000000
5/30/2012	9:24:00 AM	BCl3 MFC set to  0.000000
5/30/2012	9:24:00 AM	PH3 MFC set to  0.000000
5/30/2012	9:24:00 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:24:00 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:24:00 AM	Tube furnace set to 0
5/30/2012	9:24:03 AM	Helium valve closed
5/30/2012	9:24:03 AM	H2 valve closed
5/30/2012	9:24:03 AM	BCl3 valve closed
5/30/2012	9:24:03 AM	PH3 valve closed
5/30/2012	9:24:03 AM	SiCl4 pre valve closed
5/30/2012	9:24:03 AM	SiCl4 post valve closed
5/30/2012	9:24:03 AM	Main Vac valve closed
5/30/2012	9:24:03 AM	Bubbler valve closed
5/30/2012	9:24:03 AM	Bypass valve opened
5/30/2012	9:24:03 AM	Helium MFC set to  0.000000
5/30/2012	9:24:03 AM	H2 MFC set to  0.000000
5/30/2012	9:24:03 AM	BCl3 MFC set to  0.000000
5/30/2012	9:24:03 AM	PH3 MFC set to  0.000000
5/30/2012	9:24:03 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:24:03 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:24:03 AM	Tube furnace set to 0
5/30/2012	9:24:04 AM	Helium valve closed
5/30/2012	9:24:04 AM	H2 valve closed
5/30/2012	9:24:04 AM	BCl3 valve closed
5/30/2012	9:24:04 AM	PH3 valve closed
5/30/2012	9:24:04 AM	SiCl4 pre valve closed
5/30/2012	9:24:04 AM	SiCl4 post valve closed
5/30/2012	9:24:04 AM	Main Vac valve closed
5/30/2012	9:24:04 AM	Bubbler valve closed
5/30/2012	9:24:04 AM	Bypass valve opened
5/30/2012	9:24:04 AM	Helium MFC set to  0.000000
5/30/2012	9:24:04 AM	H2 MFC set to  0.000000
5/30/2012	9:24:04 AM	BCl3 MFC set to  0.000000
5/30/2012	9:24:04 AM	PH3 MFC set to  0.000000
5/30/2012	9:24:04 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:24:04 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:24:04 AM	Tube furnace set to 0
5/30/2012	9:24:05 AM	Helium valve closed
5/30/2012	9:24:05 AM	H2 valve closed
5/30/2012	9:24:05 AM	BCl3 valve closed
5/30/2012	9:24:05 AM	PH3 valve closed
5/30/2012	9:24:05 AM	SiCl4 pre valve closed
5/30/2012	9:24:05 AM	SiCl4 post valve closed
5/30/2012	9:24:05 AM	Bypass valve closed
5/30/2012	9:24:05 AM	Bubbler valve closed
5/30/2012	9:24:06 AM	Main Vac valve opened
5/30/2012	9:24:06 AM	Helium MFC set to  0.000000
5/30/2012	9:24:06 AM	H2 MFC set to  0.000000
5/30/2012	9:24:06 AM	BCl3 MFC set to  0.000000
5/30/2012	9:24:06 AM	PH3 MFC set to  0.000000
5/30/2012	9:24:06 AM	SiCl4 MFC set to  0.000000
5/30/2012	9:24:06 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	9:24:06 AM	Tube furnace set to 150
5/30/2012	10:09:01 AM	Helium valve closed
5/30/2012	10:09:01 AM	H2 valve closed
5/30/2012	10:09:01 AM	BCl3 valve closed
5/30/2012	10:09:01 AM	PH3 valve closed
5/30/2012	10:09:01 AM	SiCl4 pre valve closed
5/30/2012	10:09:01 AM	SiCl4 post valve closed
5/30/2012	10:09:01 AM	Bypass valve closed
5/30/2012	10:09:01 AM	Bubbler valve closed
5/30/2012	10:09:01 AM	Main Vac valve opened
5/30/2012	10:09:01 AM	Helium MFC set to  0.000000
5/30/2012	10:09:01 AM	H2 MFC set to  0.000000
5/30/2012	10:09:01 AM	BCl3 MFC set to  0.000000
5/30/2012	10:09:01 AM	PH3 MFC set to  0.000000
5/30/2012	10:09:01 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:09:01 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:09:01 AM	Tube furnace set to 0
5/30/2012	10:09:02 AM	Run finished at 10:09 AM
5/30/2012	10:09:13 AM	Main Vac valve closed
5/30/2012	10:09:21 AM	Main Vac valve opened
5/30/2012	10:09:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/30/2012	10:10:12 AM	Recipe started at 10:10 AM
5/30/2012	10:10:12 AM	Helium valve closed
5/30/2012	10:10:12 AM	H2 valve closed
5/30/2012	10:10:12 AM	BCl3 valve closed
5/30/2012	10:10:12 AM	PH3 valve closed
5/30/2012	10:10:12 AM	SiCl4 pre valve closed
5/30/2012	10:10:12 AM	SiCl4 post valve closed
5/30/2012	10:10:12 AM	Main Vac valve closed
5/30/2012	10:10:12 AM	Bubbler valve closed
5/30/2012	10:10:12 AM	Bypass valve opened
5/30/2012	10:10:12 AM	Helium MFC set to  0.000000
5/30/2012	10:10:12 AM	H2 MFC set to  0.000000
5/30/2012	10:10:12 AM	BCl3 MFC set to  0.000000
5/30/2012	10:10:12 AM	PH3 MFC set to  0.000000
5/30/2012	10:10:12 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:10:12 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:10:12 AM	Tube furnace set to 0
5/30/2012	10:10:12 AM	Helium valve closed
5/30/2012	10:10:12 AM	H2 valve closed
5/30/2012	10:10:12 AM	BCl3 valve closed
5/30/2012	10:10:12 AM	PH3 valve closed
5/30/2012	10:10:12 AM	SiCl4 pre valve closed
5/30/2012	10:10:12 AM	SiCl4 post valve closed
5/30/2012	10:10:12 AM	Main Vac valve closed
5/30/2012	10:10:12 AM	Bubbler valve closed
5/30/2012	10:10:12 AM	Bypass valve opened
5/30/2012	10:10:12 AM	Helium MFC set to  0.000000
5/30/2012	10:10:12 AM	H2 MFC set to  0.000000
5/30/2012	10:10:12 AM	BCl3 MFC set to  0.000000
5/30/2012	10:10:12 AM	PH3 MFC set to  0.000000
5/30/2012	10:10:12 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:10:12 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:10:12 AM	Tube furnace set to 0
5/30/2012	10:10:42 AM	Helium valve closed
5/30/2012	10:10:42 AM	H2 valve closed
5/30/2012	10:10:42 AM	BCl3 valve closed
5/30/2012	10:10:42 AM	PH3 valve closed
5/30/2012	10:10:42 AM	SiCl4 pre valve closed
5/30/2012	10:10:42 AM	SiCl4 post valve closed
5/30/2012	10:10:42 AM	Bypass valve closed
5/30/2012	10:10:42 AM	Bubbler valve closed
5/30/2012	10:10:42 AM	Main Vac valve opened
5/30/2012	10:10:42 AM	Helium MFC set to  0.000000
5/30/2012	10:10:42 AM	H2 MFC set to  0.000000
5/30/2012	10:10:42 AM	BCl3 MFC set to  0.000000
5/30/2012	10:10:42 AM	PH3 MFC set to  0.000000
5/30/2012	10:10:42 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:10:42 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:10:42 AM	Tube furnace set to 0
5/30/2012	10:11:12 AM	H2 valve closed
5/30/2012	10:11:13 AM	BCl3 valve closed
5/30/2012	10:11:13 AM	PH3 valve closed
5/30/2012	10:11:13 AM	SiCl4 pre valve closed
5/30/2012	10:11:13 AM	SiCl4 post valve closed
5/30/2012	10:11:13 AM	Bypass valve closed
5/30/2012	10:11:13 AM	Bubbler valve closed
5/30/2012	10:11:13 AM	Helium valve opened
5/30/2012	10:11:13 AM	Main Vac valve opened
5/30/2012	10:11:13 AM	Helium MFC set to  20.000000
5/30/2012	10:11:13 AM	H2 MFC set to  0.000000
5/30/2012	10:11:13 AM	BCl3 MFC set to  0.000000
5/30/2012	10:11:13 AM	PH3 MFC set to  0.000000
5/30/2012	10:11:13 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:11:13 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:11:13 AM	Tube furnace set to 0
5/30/2012	10:11:43 AM	Helium valve closed
5/30/2012	10:11:43 AM	H2 valve closed
5/30/2012	10:11:43 AM	BCl3 valve closed
5/30/2012	10:11:43 AM	PH3 valve closed
5/30/2012	10:11:43 AM	SiCl4 pre valve closed
5/30/2012	10:11:43 AM	SiCl4 post valve closed
5/30/2012	10:11:43 AM	Bypass valve closed
5/30/2012	10:11:43 AM	Bubbler valve closed
5/30/2012	10:11:43 AM	Main Vac valve opened
5/30/2012	10:11:43 AM	Helium MFC set to  0.000000
5/30/2012	10:11:43 AM	H2 MFC set to  0.000000
5/30/2012	10:11:43 AM	BCl3 MFC set to  0.000000
5/30/2012	10:11:43 AM	PH3 MFC set to  0.000000
5/30/2012	10:11:43 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:11:43 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:11:43 AM	Tube furnace set to 0
5/30/2012	10:12:13 AM	H2 valve closed
5/30/2012	10:12:13 AM	BCl3 valve closed
5/30/2012	10:12:13 AM	PH3 valve closed
5/30/2012	10:12:13 AM	SiCl4 pre valve closed
5/30/2012	10:12:13 AM	SiCl4 post valve closed
5/30/2012	10:12:13 AM	Bypass valve closed
5/30/2012	10:12:13 AM	Bubbler valve closed
5/30/2012	10:12:13 AM	Helium valve opened
5/30/2012	10:12:13 AM	Main Vac valve opened
5/30/2012	10:12:13 AM	Helium MFC set to  20.000000
5/30/2012	10:12:13 AM	H2 MFC set to  0.000000
5/30/2012	10:12:13 AM	BCl3 MFC set to  0.000000
5/30/2012	10:12:13 AM	PH3 MFC set to  0.000000
5/30/2012	10:12:13 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:12:13 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:12:13 AM	Tube furnace set to 0
5/30/2012	10:12:43 AM	Helium valve closed
5/30/2012	10:12:43 AM	H2 valve closed
5/30/2012	10:12:43 AM	BCl3 valve closed
5/30/2012	10:12:43 AM	PH3 valve closed
5/30/2012	10:12:43 AM	SiCl4 pre valve closed
5/30/2012	10:12:43 AM	SiCl4 post valve closed
5/30/2012	10:12:43 AM	Bypass valve closed
5/30/2012	10:12:43 AM	Bubbler valve closed
5/30/2012	10:12:43 AM	Main Vac valve opened
5/30/2012	10:12:43 AM	Helium MFC set to  0.000000
5/30/2012	10:12:43 AM	H2 MFC set to  0.000000
5/30/2012	10:12:43 AM	BCl3 MFC set to  0.000000
5/30/2012	10:12:43 AM	PH3 MFC set to  0.000000
5/30/2012	10:12:43 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:12:43 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:12:43 AM	Tube furnace set to 0
5/30/2012	10:13:13 AM	H2 valve closed
5/30/2012	10:13:13 AM	BCl3 valve closed
5/30/2012	10:13:13 AM	PH3 valve closed
5/30/2012	10:13:13 AM	SiCl4 pre valve closed
5/30/2012	10:13:13 AM	SiCl4 post valve closed
5/30/2012	10:13:13 AM	Bypass valve closed
5/30/2012	10:13:13 AM	Bubbler valve closed
5/30/2012	10:13:13 AM	Helium valve opened
5/30/2012	10:13:13 AM	Main Vac valve opened
5/30/2012	10:13:13 AM	Helium MFC set to  20.000000
5/30/2012	10:13:13 AM	H2 MFC set to  0.000000
5/30/2012	10:13:13 AM	BCl3 MFC set to  0.000000
5/30/2012	10:13:13 AM	PH3 MFC set to  0.000000
5/30/2012	10:13:14 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:13:14 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:13:14 AM	Tube furnace set to 0
5/30/2012	10:13:44 AM	Helium valve closed
5/30/2012	10:13:44 AM	H2 valve closed
5/30/2012	10:13:44 AM	BCl3 valve closed
5/30/2012	10:13:44 AM	PH3 valve closed
5/30/2012	10:13:44 AM	SiCl4 pre valve closed
5/30/2012	10:13:44 AM	SiCl4 post valve closed
5/30/2012	10:13:44 AM	Bypass valve closed
5/30/2012	10:13:44 AM	Bubbler valve closed
5/30/2012	10:13:44 AM	Main Vac valve opened
5/30/2012	10:13:44 AM	Helium MFC set to  0.000000
5/30/2012	10:13:44 AM	H2 MFC set to  0.000000
5/30/2012	10:13:44 AM	BCl3 MFC set to  0.000000
5/30/2012	10:13:44 AM	PH3 MFC set to  0.000000
5/30/2012	10:13:44 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:13:44 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:13:44 AM	Tube furnace set to 0
5/30/2012	10:14:14 AM	H2 valve closed
5/30/2012	10:14:14 AM	BCl3 valve closed
5/30/2012	10:14:14 AM	PH3 valve closed
5/30/2012	10:14:14 AM	SiCl4 pre valve closed
5/30/2012	10:14:14 AM	SiCl4 post valve closed
5/30/2012	10:14:14 AM	Bypass valve closed
5/30/2012	10:14:14 AM	Bubbler valve closed
5/30/2012	10:14:14 AM	Helium valve opened
5/30/2012	10:14:14 AM	Main Vac valve opened
5/30/2012	10:14:14 AM	Helium MFC set to  20.000000
5/30/2012	10:14:14 AM	H2 MFC set to  0.000000
5/30/2012	10:14:14 AM	BCl3 MFC set to  0.000000
5/30/2012	10:14:14 AM	PH3 MFC set to  0.000000
5/30/2012	10:14:14 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:14:14 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:14:14 AM	Tube furnace set to 0
5/30/2012	10:14:44 AM	Helium valve closed
5/30/2012	10:14:44 AM	H2 valve closed
5/30/2012	10:14:44 AM	BCl3 valve closed
5/30/2012	10:14:44 AM	PH3 valve closed
5/30/2012	10:14:44 AM	SiCl4 pre valve closed
5/30/2012	10:14:44 AM	SiCl4 post valve closed
5/30/2012	10:14:44 AM	Bypass valve closed
5/30/2012	10:14:44 AM	Bubbler valve closed
5/30/2012	10:14:44 AM	Main Vac valve opened
5/30/2012	10:14:44 AM	Helium MFC set to  0.000000
5/30/2012	10:14:44 AM	H2 MFC set to  0.000000
5/30/2012	10:14:44 AM	BCl3 MFC set to  0.000000
5/30/2012	10:14:44 AM	PH3 MFC set to  0.000000
5/30/2012	10:14:44 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:14:44 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:14:44 AM	Tube furnace set to 0
5/30/2012	10:15:14 AM	H2 valve closed
5/30/2012	10:15:14 AM	BCl3 valve closed
5/30/2012	10:15:14 AM	PH3 valve closed
5/30/2012	10:15:14 AM	SiCl4 pre valve closed
5/30/2012	10:15:14 AM	SiCl4 post valve closed
5/30/2012	10:15:14 AM	Bypass valve closed
5/30/2012	10:15:14 AM	Bubbler valve closed
5/30/2012	10:15:14 AM	Helium valve opened
5/30/2012	10:15:14 AM	Main Vac valve opened
5/30/2012	10:15:14 AM	Helium MFC set to  20.000000
5/30/2012	10:15:14 AM	H2 MFC set to  0.000000
5/30/2012	10:15:14 AM	BCl3 MFC set to  0.000000
5/30/2012	10:15:14 AM	PH3 MFC set to  0.000000
5/30/2012	10:15:14 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:15:14 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:15:15 AM	Tube furnace set to 0
5/30/2012	10:15:45 AM	Helium valve closed
5/30/2012	10:15:45 AM	H2 valve closed
5/30/2012	10:15:45 AM	BCl3 valve closed
5/30/2012	10:15:45 AM	PH3 valve closed
5/30/2012	10:15:45 AM	SiCl4 pre valve closed
5/30/2012	10:15:45 AM	SiCl4 post valve closed
5/30/2012	10:15:45 AM	Bypass valve closed
5/30/2012	10:15:45 AM	Bubbler valve closed
5/30/2012	10:15:45 AM	Main Vac valve opened
5/30/2012	10:15:45 AM	Helium MFC set to  0.000000
5/30/2012	10:15:45 AM	H2 MFC set to  0.000000
5/30/2012	10:15:45 AM	BCl3 MFC set to  0.000000
5/30/2012	10:15:45 AM	PH3 MFC set to  0.000000
5/30/2012	10:15:45 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:15:45 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:15:45 AM	Tube furnace set to 0
5/30/2012	10:16:15 AM	H2 valve closed
5/30/2012	10:16:15 AM	BCl3 valve closed
5/30/2012	10:16:15 AM	PH3 valve closed
5/30/2012	10:16:15 AM	SiCl4 pre valve closed
5/30/2012	10:16:15 AM	SiCl4 post valve closed
5/30/2012	10:16:15 AM	Bypass valve closed
5/30/2012	10:16:15 AM	Bubbler valve closed
5/30/2012	10:16:15 AM	Helium valve opened
5/30/2012	10:16:15 AM	Main Vac valve opened
5/30/2012	10:16:15 AM	Helium MFC set to  20.000000
5/30/2012	10:16:15 AM	H2 MFC set to  0.000000
5/30/2012	10:16:15 AM	BCl3 MFC set to  0.000000
5/30/2012	10:16:15 AM	PH3 MFC set to  0.000000
5/30/2012	10:16:15 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:16:15 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:16:15 AM	Tube furnace set to 0
5/30/2012	10:16:45 AM	Helium valve closed
5/30/2012	10:16:45 AM	H2 valve closed
5/30/2012	10:16:45 AM	BCl3 valve closed
5/30/2012	10:16:45 AM	PH3 valve closed
5/30/2012	10:16:45 AM	SiCl4 pre valve closed
5/30/2012	10:16:45 AM	SiCl4 post valve closed
5/30/2012	10:16:45 AM	Bypass valve closed
5/30/2012	10:16:45 AM	Bubbler valve closed
5/30/2012	10:16:45 AM	Main Vac valve opened
5/30/2012	10:16:45 AM	Helium MFC set to  0.000000
5/30/2012	10:16:45 AM	H2 MFC set to  0.000000
5/30/2012	10:16:45 AM	BCl3 MFC set to  0.000000
5/30/2012	10:16:45 AM	PH3 MFC set to  0.000000
5/30/2012	10:16:45 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:16:45 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:16:45 AM	Tube furnace set to 0
5/30/2012	10:17:15 AM	H2 valve closed
5/30/2012	10:17:15 AM	BCl3 valve closed
5/30/2012	10:17:15 AM	PH3 valve closed
5/30/2012	10:17:15 AM	SiCl4 pre valve closed
5/30/2012	10:17:15 AM	SiCl4 post valve closed
5/30/2012	10:17:15 AM	Bypass valve closed
5/30/2012	10:17:15 AM	Bubbler valve closed
5/30/2012	10:17:15 AM	Helium valve opened
5/30/2012	10:17:15 AM	Main Vac valve opened
5/30/2012	10:17:15 AM	Helium MFC set to  20.000000
5/30/2012	10:17:15 AM	H2 MFC set to  0.000000
5/30/2012	10:17:15 AM	BCl3 MFC set to  0.000000
5/30/2012	10:17:15 AM	PH3 MFC set to  0.000000
5/30/2012	10:17:15 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:17:15 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:17:16 AM	Tube furnace set to 0
5/30/2012	10:17:46 AM	Helium valve closed
5/30/2012	10:17:46 AM	H2 valve closed
5/30/2012	10:17:46 AM	BCl3 valve closed
5/30/2012	10:17:46 AM	PH3 valve closed
5/30/2012	10:17:46 AM	SiCl4 pre valve closed
5/30/2012	10:17:46 AM	SiCl4 post valve closed
5/30/2012	10:17:46 AM	Bypass valve closed
5/30/2012	10:17:46 AM	Bubbler valve closed
5/30/2012	10:17:46 AM	Main Vac valve opened
5/30/2012	10:17:46 AM	Helium MFC set to  0.000000
5/30/2012	10:17:46 AM	H2 MFC set to  0.000000
5/30/2012	10:17:46 AM	BCl3 MFC set to  0.000000
5/30/2012	10:17:46 AM	PH3 MFC set to  0.000000
5/30/2012	10:17:46 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:17:46 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:17:46 AM	Tube furnace set to 0
5/30/2012	10:18:16 AM	H2 valve closed
5/30/2012	10:18:16 AM	BCl3 valve closed
5/30/2012	10:18:16 AM	PH3 valve closed
5/30/2012	10:18:16 AM	SiCl4 pre valve closed
5/30/2012	10:18:16 AM	SiCl4 post valve closed
5/30/2012	10:18:16 AM	Bypass valve closed
5/30/2012	10:18:16 AM	Bubbler valve closed
5/30/2012	10:18:16 AM	Helium valve opened
5/30/2012	10:18:16 AM	Main Vac valve opened
5/30/2012	10:18:16 AM	Helium MFC set to  20.000000
5/30/2012	10:18:16 AM	H2 MFC set to  0.000000
5/30/2012	10:18:16 AM	BCl3 MFC set to  0.000000
5/30/2012	10:18:16 AM	PH3 MFC set to  0.000000
5/30/2012	10:18:16 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:18:16 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:18:16 AM	Tube furnace set to 0
5/30/2012	10:18:46 AM	Helium valve closed
5/30/2012	10:18:46 AM	H2 valve closed
5/30/2012	10:18:46 AM	BCl3 valve closed
5/30/2012	10:18:46 AM	PH3 valve closed
5/30/2012	10:18:46 AM	SiCl4 pre valve closed
5/30/2012	10:18:46 AM	SiCl4 post valve closed
5/30/2012	10:18:46 AM	Bypass valve closed
5/30/2012	10:18:46 AM	Bubbler valve closed
5/30/2012	10:18:46 AM	Main Vac valve opened
5/30/2012	10:18:46 AM	Helium MFC set to  0.000000
5/30/2012	10:18:46 AM	H2 MFC set to  0.000000
5/30/2012	10:18:46 AM	BCl3 MFC set to  0.000000
5/30/2012	10:18:46 AM	PH3 MFC set to  0.000000
5/30/2012	10:18:46 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:18:46 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:18:46 AM	Tube furnace set to 0
5/30/2012	10:19:16 AM	H2 valve closed
5/30/2012	10:19:16 AM	BCl3 valve closed
5/30/2012	10:19:16 AM	PH3 valve closed
5/30/2012	10:19:16 AM	SiCl4 pre valve closed
5/30/2012	10:19:16 AM	SiCl4 post valve closed
5/30/2012	10:19:16 AM	Bypass valve closed
5/30/2012	10:19:16 AM	Bubbler valve closed
5/30/2012	10:19:16 AM	Helium valve opened
5/30/2012	10:19:16 AM	Main Vac valve opened
5/30/2012	10:19:16 AM	Helium MFC set to  20.000000
5/30/2012	10:19:16 AM	H2 MFC set to  0.000000
5/30/2012	10:19:16 AM	BCl3 MFC set to  0.000000
5/30/2012	10:19:16 AM	PH3 MFC set to  0.000000
5/30/2012	10:19:16 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:19:16 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:19:16 AM	Tube furnace set to 0
5/30/2012	10:19:47 AM	Helium valve closed
5/30/2012	10:19:47 AM	H2 valve closed
5/30/2012	10:19:47 AM	BCl3 valve closed
5/30/2012	10:19:47 AM	PH3 valve closed
5/30/2012	10:19:47 AM	SiCl4 pre valve closed
5/30/2012	10:19:47 AM	SiCl4 post valve closed
5/30/2012	10:19:47 AM	Bypass valve closed
5/30/2012	10:19:47 AM	Bubbler valve closed
5/30/2012	10:19:47 AM	Main Vac valve opened
5/30/2012	10:19:47 AM	Helium MFC set to  0.000000
5/30/2012	10:19:47 AM	H2 MFC set to  0.000000
5/30/2012	10:19:47 AM	BCl3 MFC set to  0.000000
5/30/2012	10:19:47 AM	PH3 MFC set to  0.000000
5/30/2012	10:19:47 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:19:47 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:19:47 AM	Tube furnace set to 0
5/30/2012	10:20:17 AM	H2 valve closed
5/30/2012	10:20:17 AM	BCl3 valve closed
5/30/2012	10:20:17 AM	PH3 valve closed
5/30/2012	10:20:17 AM	SiCl4 pre valve closed
5/30/2012	10:20:17 AM	SiCl4 post valve closed
5/30/2012	10:20:17 AM	Bypass valve closed
5/30/2012	10:20:17 AM	Bubbler valve closed
5/30/2012	10:20:17 AM	Helium valve opened
5/30/2012	10:20:17 AM	Main Vac valve opened
5/30/2012	10:20:17 AM	Helium MFC set to  20.000000
5/30/2012	10:20:17 AM	H2 MFC set to  0.000000
5/30/2012	10:20:17 AM	BCl3 MFC set to  0.000000
5/30/2012	10:20:17 AM	PH3 MFC set to  0.000000
5/30/2012	10:20:17 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:20:17 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:20:17 AM	Tube furnace set to 0
5/30/2012	10:20:47 AM	Helium valve closed
5/30/2012	10:20:47 AM	H2 valve closed
5/30/2012	10:20:47 AM	BCl3 valve closed
5/30/2012	10:20:47 AM	PH3 valve closed
5/30/2012	10:20:47 AM	SiCl4 pre valve closed
5/30/2012	10:20:47 AM	SiCl4 post valve closed
5/30/2012	10:20:47 AM	Bypass valve closed
5/30/2012	10:20:47 AM	Bubbler valve closed
5/30/2012	10:20:47 AM	Main Vac valve opened
5/30/2012	10:20:47 AM	Helium MFC set to  0.000000
5/30/2012	10:20:47 AM	H2 MFC set to  0.000000
5/30/2012	10:20:47 AM	BCl3 MFC set to  0.000000
5/30/2012	10:20:47 AM	PH3 MFC set to  0.000000
5/30/2012	10:20:47 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:20:47 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:20:47 AM	Tube furnace set to 0
5/30/2012	10:20:48 AM	Run finished at 10:20 AM
5/30/2012	10:20:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/30/2012	10:33:59 AM	Main Vac valve closed
5/30/2012	10:34:13 AM	Main Vac valve opened
5/30/2012	10:35:07 AM	Recipe started at 10:35 AM
5/30/2012	10:35:07 AM	Helium valve closed
5/30/2012	10:35:07 AM	H2 valve closed
5/30/2012	10:35:07 AM	BCl3 valve closed
5/30/2012	10:35:07 AM	PH3 valve closed
5/30/2012	10:35:07 AM	SiCl4 pre valve closed
5/30/2012	10:35:07 AM	SiCl4 post valve closed
5/30/2012	10:35:07 AM	Main Vac valve closed
5/30/2012	10:35:07 AM	Bypass valve closed
5/30/2012	10:35:07 AM	Bubbler valve closed
5/30/2012	10:35:07 AM	Helium MFC set to  0.000000
5/30/2012	10:35:07 AM	H2 MFC set to  0.000000
5/30/2012	10:35:07 AM	BCl3 MFC set to  0.000000
5/30/2012	10:35:07 AM	PH3 MFC set to  0.000000
5/30/2012	10:35:07 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:35:07 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:35:07 AM	Tube furnace set to 0
5/30/2012	10:35:10 AM	Helium valve closed
5/30/2012	10:35:10 AM	BCl3 valve closed
5/30/2012	10:35:10 AM	PH3 valve closed
5/30/2012	10:35:10 AM	SiCl4 pre valve closed
5/30/2012	10:35:10 AM	SiCl4 post valve closed
5/30/2012	10:35:10 AM	Main Vac valve closed
5/30/2012	10:35:10 AM	Bypass valve closed
5/30/2012	10:35:10 AM	Bubbler valve closed
5/30/2012	10:35:10 AM	H2 valve opened
5/30/2012	10:35:10 AM	Helium MFC set to  0.000000
5/30/2012	10:35:10 AM	H2 MFC set to  500.000000
5/30/2012	10:35:10 AM	BCl3 MFC set to  0.000000
5/30/2012	10:35:10 AM	PH3 MFC set to  0.000000
5/30/2012	10:35:10 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:35:10 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:35:11 AM	Tube furnace set to 50
5/30/2012	10:36:23 AM	Helium valve closed
5/30/2012	10:36:23 AM	BCl3 valve closed
5/30/2012	10:36:23 AM	PH3 valve closed
5/30/2012	10:36:23 AM	SiCl4 pre valve closed
5/30/2012	10:36:23 AM	SiCl4 post valve closed
5/30/2012	10:36:23 AM	Main Vac valve closed
5/30/2012	10:36:23 AM	Bypass valve closed
5/30/2012	10:36:23 AM	H2 valve opened
5/30/2012	10:36:23 AM	Bubbler valve opened
5/30/2012	10:36:23 AM	Helium MFC set to  0.000000
5/30/2012	10:36:23 AM	H2 MFC set to  500.000000
5/30/2012	10:36:23 AM	BCl3 MFC set to  0.000000
5/30/2012	10:36:23 AM	PH3 MFC set to  0.000000
5/30/2012	10:36:23 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:36:23 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:36:24 AM	Tube furnace set to 50
5/30/2012	10:36:25 AM	Helium valve closed
5/30/2012	10:36:25 AM	BCl3 valve closed
5/30/2012	10:36:25 AM	PH3 valve closed
5/30/2012	10:36:25 AM	SiCl4 pre valve closed
5/30/2012	10:36:25 AM	SiCl4 post valve closed
5/30/2012	10:36:25 AM	Main Vac valve closed
5/30/2012	10:36:25 AM	Bypass valve closed
5/30/2012	10:36:25 AM	H2 valve opened
5/30/2012	10:36:25 AM	Bubbler valve opened
5/30/2012	10:36:25 AM	Helium MFC set to  0.000000
5/30/2012	10:36:25 AM	H2 MFC set to  500.000000
5/30/2012	10:36:25 AM	BCl3 MFC set to  0.000000
5/30/2012	10:36:25 AM	PH3 MFC set to  0.000000
5/30/2012	10:36:25 AM	SiCl4 MFC set to  0.000000
5/30/2012	10:36:25 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:36:25 AM	Tube furnace set to 1000
5/30/2012	10:56:25 AM	Helium valve closed
5/30/2012	10:56:25 AM	BCl3 valve closed
5/30/2012	10:56:25 AM	Main Vac valve closed
5/30/2012	10:56:25 AM	Bypass valve closed
5/30/2012	10:56:25 AM	H2 valve opened
5/30/2012	10:56:25 AM	PH3 valve opened
5/30/2012	10:56:25 AM	SiCl4 pre valve opened
5/30/2012	10:56:25 AM	SiCl4 post valve opened
5/30/2012	10:56:25 AM	Bubbler valve opened
5/30/2012	10:56:25 AM	Helium MFC set to  0.000000
5/30/2012	10:56:25 AM	H2 MFC set to  500.000000
5/30/2012	10:56:25 AM	BCl3 MFC set to  0.000000
5/30/2012	10:56:25 AM	PH3 MFC set to  0.300000
5/30/2012	10:56:25 AM	SiCl4 MFC set to  50.000000
5/30/2012	10:56:25 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	10:56:25 AM	Tube furnace set to 1000
5/30/2012	11:16:25 AM	Helium valve closed
5/30/2012	11:16:25 AM	BCl3 valve closed
5/30/2012	11:16:25 AM	PH3 valve closed
5/30/2012	11:16:25 AM	SiCl4 pre valve closed
5/30/2012	11:16:25 AM	SiCl4 post valve closed
5/30/2012	11:16:25 AM	Main Vac valve closed
5/30/2012	11:16:25 AM	Bypass valve closed
5/30/2012	11:16:25 AM	H2 valve opened
5/30/2012	11:16:25 AM	Bubbler valve opened
5/30/2012	11:16:25 AM	Helium MFC set to  0.000000
5/30/2012	11:16:25 AM	H2 MFC set to  500.000000
5/30/2012	11:16:25 AM	BCl3 MFC set to  0.000000
5/30/2012	11:16:25 AM	PH3 MFC set to  0.000000
5/30/2012	11:16:25 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:16:25 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:16:25 AM	Tube furnace set to 950
5/30/2012	11:19:25 AM	H2 valve closed
5/30/2012	11:19:25 AM	BCl3 valve closed
5/30/2012	11:19:25 AM	PH3 valve closed
5/30/2012	11:19:25 AM	SiCl4 pre valve closed
5/30/2012	11:19:26 AM	SiCl4 post valve closed
5/30/2012	11:19:26 AM	Main Vac valve closed
5/30/2012	11:19:26 AM	Bypass valve closed
5/30/2012	11:19:26 AM	Helium valve opened
5/30/2012	11:19:26 AM	Bubbler valve opened
5/30/2012	11:19:26 AM	Helium MFC set to  500.000000
5/30/2012	11:19:26 AM	H2 MFC set to  0.000000
5/30/2012	11:19:26 AM	BCl3 MFC set to  0.000000
5/30/2012	11:19:26 AM	PH3 MFC set to  0.000000
5/30/2012	11:19:26 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:19:26 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:19:26 AM	Tube furnace set to 900
5/30/2012	11:22:26 AM	H2 valve closed
5/30/2012	11:22:26 AM	BCl3 valve closed
5/30/2012	11:22:26 AM	PH3 valve closed
5/30/2012	11:22:26 AM	SiCl4 pre valve closed
5/30/2012	11:22:26 AM	SiCl4 post valve closed
5/30/2012	11:22:26 AM	Main Vac valve closed
5/30/2012	11:22:26 AM	Bypass valve closed
5/30/2012	11:22:26 AM	Helium valve opened
5/30/2012	11:22:26 AM	Bubbler valve opened
5/30/2012	11:22:26 AM	Helium MFC set to  500.000000
5/30/2012	11:22:26 AM	H2 MFC set to  0.000000
5/30/2012	11:22:26 AM	BCl3 MFC set to  0.000000
5/30/2012	11:22:26 AM	PH3 MFC set to  0.000000
5/30/2012	11:22:26 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:22:26 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:22:26 AM	Tube furnace set to 850
5/30/2012	11:25:26 AM	H2 valve closed
5/30/2012	11:25:26 AM	BCl3 valve closed
5/30/2012	11:25:26 AM	PH3 valve closed
5/30/2012	11:25:26 AM	SiCl4 pre valve closed
5/30/2012	11:25:26 AM	SiCl4 post valve closed
5/30/2012	11:25:26 AM	Main Vac valve closed
5/30/2012	11:25:26 AM	Bypass valve closed
5/30/2012	11:25:26 AM	Helium valve opened
5/30/2012	11:25:26 AM	Bubbler valve opened
5/30/2012	11:25:26 AM	Helium MFC set to  500.000000
5/30/2012	11:25:26 AM	H2 MFC set to  0.000000
5/30/2012	11:25:26 AM	BCl3 MFC set to  0.000000
5/30/2012	11:25:26 AM	PH3 MFC set to  0.000000
5/30/2012	11:25:26 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:25:26 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:25:26 AM	Tube furnace set to 800
5/30/2012	11:28:26 AM	H2 valve closed
5/30/2012	11:28:26 AM	BCl3 valve closed
5/30/2012	11:28:26 AM	PH3 valve closed
5/30/2012	11:28:26 AM	SiCl4 pre valve closed
5/30/2012	11:28:26 AM	SiCl4 post valve closed
5/30/2012	11:28:26 AM	Main Vac valve closed
5/30/2012	11:28:26 AM	Bypass valve closed
5/30/2012	11:28:26 AM	Helium valve opened
5/30/2012	11:28:26 AM	Bubbler valve opened
5/30/2012	11:28:26 AM	Helium MFC set to  500.000000
5/30/2012	11:28:26 AM	H2 MFC set to  0.000000
5/30/2012	11:28:26 AM	BCl3 MFC set to  0.000000
5/30/2012	11:28:26 AM	PH3 MFC set to  0.000000
5/30/2012	11:28:26 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:28:26 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:28:26 AM	Tube furnace set to 750
5/30/2012	11:31:26 AM	H2 valve closed
5/30/2012	11:31:26 AM	BCl3 valve closed
5/30/2012	11:31:26 AM	PH3 valve closed
5/30/2012	11:31:26 AM	SiCl4 pre valve closed
5/30/2012	11:31:26 AM	SiCl4 post valve closed
5/30/2012	11:31:26 AM	Main Vac valve closed
5/30/2012	11:31:26 AM	Bypass valve closed
5/30/2012	11:31:26 AM	Helium valve opened
5/30/2012	11:31:26 AM	Bubbler valve opened
5/30/2012	11:31:26 AM	Helium MFC set to  500.000000
5/30/2012	11:31:26 AM	H2 MFC set to  0.000000
5/30/2012	11:31:26 AM	BCl3 MFC set to  0.000000
5/30/2012	11:31:26 AM	PH3 MFC set to  0.000000
5/30/2012	11:31:26 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:31:26 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:31:27 AM	Tube furnace set to 0
5/30/2012	11:39:19 AM	Run aborted at 11:39 AM
5/30/2012	11:39:19 AM	Helium valve closed
5/30/2012	11:39:19 AM	H2 valve closed
5/30/2012	11:39:19 AM	BCl3 valve closed
5/30/2012	11:39:19 AM	PH3 valve closed
5/30/2012	11:39:19 AM	SiCl4 pre valve closed
5/30/2012	11:39:19 AM	SiCl4 post valve closed
5/30/2012	11:39:19 AM	Bypass valve closed
5/30/2012	11:39:19 AM	Main Vac valve closed
5/30/2012	11:39:19 AM	Bubbler valve closed
5/30/2012	11:39:19 AM	Helium MFC set to  0.000000
5/30/2012	11:39:19 AM	H2 MFC set to  0.000000
5/30/2012	11:39:19 AM	BCl3 MFC set to  0.000000
5/30/2012	11:39:19 AM	PH3 MFC set to  0.000000
5/30/2012	11:39:19 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:39:19 AM	Tube furnace set to 0
5/30/2012	11:39:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2012	11:39:23 AM	Recipe started at 11:39 AM
5/30/2012	11:39:23 AM	Helium valve closed
5/30/2012	11:39:23 AM	H2 valve closed
5/30/2012	11:39:23 AM	BCl3 valve closed
5/30/2012	11:39:23 AM	PH3 valve closed
5/30/2012	11:39:23 AM	SiCl4 pre valve closed
5/30/2012	11:39:23 AM	SiCl4 post valve closed
5/30/2012	11:39:23 AM	Main Vac valve closed
5/30/2012	11:39:23 AM	Bypass valve closed
5/30/2012	11:39:23 AM	Bubbler valve closed
5/30/2012	11:39:23 AM	Helium MFC set to  0.000000
5/30/2012	11:39:23 AM	H2 MFC set to  0.000000
5/30/2012	11:39:23 AM	BCl3 MFC set to  0.000000
5/30/2012	11:39:23 AM	PH3 MFC set to  0.000000
5/30/2012	11:39:23 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:39:23 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:39:23 AM	Tube furnace set to 0
5/30/2012	11:39:26 AM	H2 valve closed
5/30/2012	11:39:26 AM	BCl3 valve closed
5/30/2012	11:39:26 AM	PH3 valve closed
5/30/2012	11:39:26 AM	SiCl4 pre valve closed
5/30/2012	11:39:26 AM	SiCl4 post valve closed
5/30/2012	11:39:26 AM	Main Vac valve closed
5/30/2012	11:39:26 AM	Bypass valve closed
5/30/2012	11:39:26 AM	Bubbler valve closed
5/30/2012	11:39:26 AM	Helium valve opened
5/30/2012	11:39:26 AM	Helium MFC set to  500.000000
5/30/2012	11:39:26 AM	H2 MFC set to  0.000000
5/30/2012	11:39:26 AM	BCl3 MFC set to  0.000000
5/30/2012	11:39:26 AM	PH3 MFC set to  0.000000
5/30/2012	11:39:26 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:39:26 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:39:26 AM	Tube furnace set to 0
5/30/2012	11:39:27 AM	Helium valve closed
5/30/2012	11:39:27 AM	H2 valve closed
5/30/2012	11:39:27 AM	BCl3 valve closed
5/30/2012	11:39:27 AM	PH3 valve closed
5/30/2012	11:39:27 AM	SiCl4 pre valve closed
5/30/2012	11:39:27 AM	SiCl4 post valve closed
5/30/2012	11:39:27 AM	Main Vac valve closed
5/30/2012	11:39:27 AM	Bypass valve closed
5/30/2012	11:39:27 AM	Bubbler valve closed
5/30/2012	11:39:27 AM	Helium MFC set to  0.000000
5/30/2012	11:39:27 AM	H2 MFC set to  0.000000
5/30/2012	11:39:27 AM	BCl3 MFC set to  0.000000
5/30/2012	11:39:27 AM	PH3 MFC set to  0.000000
5/30/2012	11:39:27 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:39:27 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:39:27 AM	Tube furnace set to 0
5/30/2012	11:39:28 AM	Run finished at 11:39 AM
5/30/2012	11:39:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2012	11:44:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2012	11:44:16 AM	Recipe started at 11:44 AM
5/30/2012	11:44:16 AM	Helium valve closed
5/30/2012	11:44:16 AM	H2 valve closed
5/30/2012	11:44:16 AM	BCl3 valve closed
5/30/2012	11:44:16 AM	PH3 valve closed
5/30/2012	11:44:16 AM	SiCl4 pre valve closed
5/30/2012	11:44:16 AM	SiCl4 post valve closed
5/30/2012	11:44:16 AM	Main Vac valve closed
5/30/2012	11:44:16 AM	Bubbler valve closed
5/30/2012	11:44:16 AM	Bypass valve opened
5/30/2012	11:44:16 AM	Helium MFC set to  0.000000
5/30/2012	11:44:16 AM	H2 MFC set to  0.000000
5/30/2012	11:44:16 AM	BCl3 MFC set to  0.000000
5/30/2012	11:44:16 AM	PH3 MFC set to  0.000000
5/30/2012	11:44:16 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:44:16 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:44:16 AM	Tube furnace set to 0
5/30/2012	11:45:20 AM	Helium valve closed
5/30/2012	11:45:20 AM	H2 valve closed
5/30/2012	11:45:20 AM	BCl3 valve closed
5/30/2012	11:45:20 AM	PH3 valve closed
5/30/2012	11:45:20 AM	SiCl4 pre valve closed
5/30/2012	11:45:20 AM	SiCl4 post valve closed
5/30/2012	11:45:20 AM	Main Vac valve closed
5/30/2012	11:45:20 AM	Bubbler valve closed
5/30/2012	11:45:20 AM	Bypass valve opened
5/30/2012	11:45:20 AM	Helium MFC set to  0.000000
5/30/2012	11:45:20 AM	H2 MFC set to  0.000000
5/30/2012	11:45:20 AM	BCl3 MFC set to  0.000000
5/30/2012	11:45:20 AM	PH3 MFC set to  0.000000
5/30/2012	11:45:20 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:45:20 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:45:21 AM	Tube furnace set to 0
5/30/2012	11:46:21 AM	Helium valve closed
5/30/2012	11:46:21 AM	H2 valve closed
5/30/2012	11:46:21 AM	BCl3 valve closed
5/30/2012	11:46:21 AM	PH3 valve closed
5/30/2012	11:46:21 AM	SiCl4 pre valve closed
5/30/2012	11:46:21 AM	SiCl4 post valve closed
5/30/2012	11:46:21 AM	Bypass valve closed
5/30/2012	11:46:21 AM	Bubbler valve closed
5/30/2012	11:46:21 AM	Main Vac valve opened
5/30/2012	11:46:21 AM	Helium MFC set to  0.000000
5/30/2012	11:46:21 AM	H2 MFC set to  0.000000
5/30/2012	11:46:21 AM	BCl3 MFC set to  0.000000
5/30/2012	11:46:21 AM	PH3 MFC set to  0.000000
5/30/2012	11:46:21 AM	SiCl4 MFC set to  0.000000
5/30/2012	11:46:21 AM	Bypass solenoid MFC set to  0.000000
5/30/2012	11:46:21 AM	Tube furnace set to 0
5/30/2012	11:46:22 AM	Run finished at 11:46 AM
5/30/2012	11:46:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2012	12:13:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/30/2012	12:13:59 PM	Recipe started at 12:13 PM
5/30/2012	12:13:59 PM	Helium valve closed
5/30/2012	12:13:59 PM	H2 valve closed
5/30/2012	12:13:59 PM	BCl3 valve closed
5/30/2012	12:13:59 PM	PH3 valve closed
5/30/2012	12:13:59 PM	SiCl4 pre valve closed
5/30/2012	12:13:59 PM	SiCl4 post valve closed
5/30/2012	12:13:59 PM	Main Vac valve closed
5/30/2012	12:13:59 PM	Bubbler valve closed
5/30/2012	12:13:59 PM	Bypass valve opened
5/30/2012	12:13:59 PM	Helium MFC set to  0.000000
5/30/2012	12:13:59 PM	H2 MFC set to  0.000000
5/30/2012	12:13:59 PM	BCl3 MFC set to  0.000000
5/30/2012	12:13:59 PM	PH3 MFC set to  0.000000
5/30/2012	12:13:59 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:13:59 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:13:59 PM	Tube furnace set to 0
5/30/2012	12:13:59 PM	Helium valve closed
5/30/2012	12:13:59 PM	H2 valve closed
5/30/2012	12:13:59 PM	BCl3 valve closed
5/30/2012	12:13:59 PM	PH3 valve closed
5/30/2012	12:13:59 PM	SiCl4 pre valve closed
5/30/2012	12:13:59 PM	SiCl4 post valve closed
5/30/2012	12:13:59 PM	Main Vac valve closed
5/30/2012	12:13:59 PM	Bubbler valve closed
5/30/2012	12:13:59 PM	Bypass valve opened
5/30/2012	12:13:59 PM	Helium MFC set to  0.000000
5/30/2012	12:13:59 PM	H2 MFC set to  0.000000
5/30/2012	12:13:59 PM	BCl3 MFC set to  0.000000
5/30/2012	12:14:00 PM	PH3 MFC set to  0.000000
5/30/2012	12:14:00 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:14:00 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:14:00 PM	Tube furnace set to 0
5/30/2012	12:14:30 PM	Helium valve closed
5/30/2012	12:14:30 PM	H2 valve closed
5/30/2012	12:14:30 PM	BCl3 valve closed
5/30/2012	12:14:30 PM	PH3 valve closed
5/30/2012	12:14:30 PM	SiCl4 pre valve closed
5/30/2012	12:14:30 PM	SiCl4 post valve closed
5/30/2012	12:14:30 PM	Bypass valve closed
5/30/2012	12:14:30 PM	Bubbler valve closed
5/30/2012	12:14:30 PM	Main Vac valve opened
5/30/2012	12:14:30 PM	Helium MFC set to  0.000000
5/30/2012	12:14:30 PM	H2 MFC set to  0.000000
5/30/2012	12:14:30 PM	BCl3 MFC set to  0.000000
5/30/2012	12:14:30 PM	PH3 MFC set to  0.000000
5/30/2012	12:14:30 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:14:30 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:14:30 PM	Tube furnace set to 0
5/30/2012	12:15:00 PM	H2 valve closed
5/30/2012	12:15:00 PM	BCl3 valve closed
5/30/2012	12:15:00 PM	PH3 valve closed
5/30/2012	12:15:00 PM	SiCl4 pre valve closed
5/30/2012	12:15:00 PM	SiCl4 post valve closed
5/30/2012	12:15:00 PM	Bypass valve closed
5/30/2012	12:15:00 PM	Bubbler valve closed
5/30/2012	12:15:00 PM	Helium valve opened
5/30/2012	12:15:00 PM	Main Vac valve opened
5/30/2012	12:15:00 PM	Helium MFC set to  20.000000
5/30/2012	12:15:00 PM	H2 MFC set to  0.000000
5/30/2012	12:15:00 PM	BCl3 MFC set to  0.000000
5/30/2012	12:15:00 PM	PH3 MFC set to  0.000000
5/30/2012	12:15:00 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:15:00 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:15:00 PM	Tube furnace set to 0
5/30/2012	12:15:30 PM	Helium valve closed
5/30/2012	12:15:30 PM	H2 valve closed
5/30/2012	12:15:30 PM	BCl3 valve closed
5/30/2012	12:15:30 PM	PH3 valve closed
5/30/2012	12:15:30 PM	SiCl4 pre valve closed
5/30/2012	12:15:30 PM	SiCl4 post valve closed
5/30/2012	12:15:30 PM	Bypass valve closed
5/30/2012	12:15:30 PM	Bubbler valve closed
5/30/2012	12:15:30 PM	Main Vac valve opened
5/30/2012	12:15:30 PM	Helium MFC set to  0.000000
5/30/2012	12:15:30 PM	H2 MFC set to  0.000000
5/30/2012	12:15:30 PM	BCl3 MFC set to  0.000000
5/30/2012	12:15:30 PM	PH3 MFC set to  0.000000
5/30/2012	12:15:30 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:15:30 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:15:30 PM	Tube furnace set to 0
5/30/2012	12:16:00 PM	H2 valve closed
5/30/2012	12:16:00 PM	BCl3 valve closed
5/30/2012	12:16:00 PM	PH3 valve closed
5/30/2012	12:16:00 PM	SiCl4 pre valve closed
5/30/2012	12:16:00 PM	SiCl4 post valve closed
5/30/2012	12:16:00 PM	Bypass valve closed
5/30/2012	12:16:00 PM	Bubbler valve closed
5/30/2012	12:16:00 PM	Helium valve opened
5/30/2012	12:16:00 PM	Main Vac valve opened
5/30/2012	12:16:00 PM	Helium MFC set to  20.000000
5/30/2012	12:16:00 PM	H2 MFC set to  0.000000
5/30/2012	12:16:00 PM	BCl3 MFC set to  0.000000
5/30/2012	12:16:00 PM	PH3 MFC set to  0.000000
5/30/2012	12:16:00 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:16:00 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:16:01 PM	Tube furnace set to 0
5/30/2012	12:16:31 PM	Helium valve closed
5/30/2012	12:16:31 PM	H2 valve closed
5/30/2012	12:16:31 PM	BCl3 valve closed
5/30/2012	12:16:31 PM	PH3 valve closed
5/30/2012	12:16:31 PM	SiCl4 pre valve closed
5/30/2012	12:16:31 PM	SiCl4 post valve closed
5/30/2012	12:16:31 PM	Bypass valve closed
5/30/2012	12:16:31 PM	Bubbler valve closed
5/30/2012	12:16:31 PM	Main Vac valve opened
5/30/2012	12:16:31 PM	Helium MFC set to  0.000000
5/30/2012	12:16:31 PM	H2 MFC set to  0.000000
5/30/2012	12:16:31 PM	BCl3 MFC set to  0.000000
5/30/2012	12:16:31 PM	PH3 MFC set to  0.000000
5/30/2012	12:16:31 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:16:31 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:16:31 PM	Tube furnace set to 0
5/30/2012	12:17:01 PM	H2 valve closed
5/30/2012	12:17:01 PM	BCl3 valve closed
5/30/2012	12:17:01 PM	PH3 valve closed
5/30/2012	12:17:01 PM	SiCl4 pre valve closed
5/30/2012	12:17:01 PM	SiCl4 post valve closed
5/30/2012	12:17:01 PM	Bypass valve closed
5/30/2012	12:17:01 PM	Bubbler valve closed
5/30/2012	12:17:01 PM	Helium valve opened
5/30/2012	12:17:01 PM	Main Vac valve opened
5/30/2012	12:17:01 PM	Helium MFC set to  20.000000
5/30/2012	12:17:01 PM	H2 MFC set to  0.000000
5/30/2012	12:17:01 PM	BCl3 MFC set to  0.000000
5/30/2012	12:17:01 PM	PH3 MFC set to  0.000000
5/30/2012	12:17:01 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:17:01 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:17:01 PM	Tube furnace set to 0
5/30/2012	12:17:31 PM	Helium valve closed
5/30/2012	12:17:31 PM	H2 valve closed
5/30/2012	12:17:31 PM	BCl3 valve closed
5/30/2012	12:17:31 PM	PH3 valve closed
5/30/2012	12:17:31 PM	SiCl4 pre valve closed
5/30/2012	12:17:31 PM	SiCl4 post valve closed
5/30/2012	12:17:31 PM	Bypass valve closed
5/30/2012	12:17:31 PM	Bubbler valve closed
5/30/2012	12:17:31 PM	Main Vac valve opened
5/30/2012	12:17:31 PM	Helium MFC set to  0.000000
5/30/2012	12:17:31 PM	H2 MFC set to  0.000000
5/30/2012	12:17:31 PM	BCl3 MFC set to  0.000000
5/30/2012	12:17:31 PM	PH3 MFC set to  0.000000
5/30/2012	12:17:31 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:17:31 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:17:31 PM	Tube furnace set to 0
5/30/2012	12:18:01 PM	H2 valve closed
5/30/2012	12:18:01 PM	BCl3 valve closed
5/30/2012	12:18:01 PM	PH3 valve closed
5/30/2012	12:18:01 PM	SiCl4 pre valve closed
5/30/2012	12:18:01 PM	SiCl4 post valve closed
5/30/2012	12:18:01 PM	Bypass valve closed
5/30/2012	12:18:01 PM	Bubbler valve closed
5/30/2012	12:18:01 PM	Helium valve opened
5/30/2012	12:18:01 PM	Main Vac valve opened
5/30/2012	12:18:01 PM	Helium MFC set to  20.000000
5/30/2012	12:18:01 PM	H2 MFC set to  0.000000
5/30/2012	12:18:01 PM	BCl3 MFC set to  0.000000
5/30/2012	12:18:01 PM	PH3 MFC set to  0.000000
5/30/2012	12:18:01 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:18:01 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:18:02 PM	Tube furnace set to 0
5/30/2012	12:18:32 PM	Helium valve closed
5/30/2012	12:18:32 PM	H2 valve closed
5/30/2012	12:18:32 PM	BCl3 valve closed
5/30/2012	12:18:32 PM	PH3 valve closed
5/30/2012	12:18:32 PM	SiCl4 pre valve closed
5/30/2012	12:18:32 PM	SiCl4 post valve closed
5/30/2012	12:18:32 PM	Bypass valve closed
5/30/2012	12:18:32 PM	Bubbler valve closed
5/30/2012	12:18:32 PM	Main Vac valve opened
5/30/2012	12:18:32 PM	Helium MFC set to  0.000000
5/30/2012	12:18:32 PM	H2 MFC set to  0.000000
5/30/2012	12:18:32 PM	BCl3 MFC set to  0.000000
5/30/2012	12:18:32 PM	PH3 MFC set to  0.000000
5/30/2012	12:18:32 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:18:32 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:18:32 PM	Tube furnace set to 0
5/30/2012	12:19:02 PM	H2 valve closed
5/30/2012	12:19:02 PM	BCl3 valve closed
5/30/2012	12:19:02 PM	PH3 valve closed
5/30/2012	12:19:02 PM	SiCl4 pre valve closed
5/30/2012	12:19:02 PM	SiCl4 post valve closed
5/30/2012	12:19:02 PM	Bypass valve closed
5/30/2012	12:19:02 PM	Bubbler valve closed
5/30/2012	12:19:02 PM	Helium valve opened
5/30/2012	12:19:02 PM	Main Vac valve opened
5/30/2012	12:19:02 PM	Helium MFC set to  20.000000
5/30/2012	12:19:02 PM	H2 MFC set to  0.000000
5/30/2012	12:19:02 PM	BCl3 MFC set to  0.000000
5/30/2012	12:19:02 PM	PH3 MFC set to  0.000000
5/30/2012	12:19:02 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:19:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:19:02 PM	Tube furnace set to 0
5/30/2012	12:19:32 PM	Helium valve closed
5/30/2012	12:19:32 PM	H2 valve closed
5/30/2012	12:19:32 PM	BCl3 valve closed
5/30/2012	12:19:32 PM	PH3 valve closed
5/30/2012	12:19:32 PM	SiCl4 pre valve closed
5/30/2012	12:19:32 PM	SiCl4 post valve closed
5/30/2012	12:19:32 PM	Bypass valve closed
5/30/2012	12:19:32 PM	Bubbler valve closed
5/30/2012	12:19:32 PM	Main Vac valve opened
5/30/2012	12:19:32 PM	Helium MFC set to  0.000000
5/30/2012	12:19:32 PM	H2 MFC set to  0.000000
5/30/2012	12:19:32 PM	BCl3 MFC set to  0.000000
5/30/2012	12:19:32 PM	PH3 MFC set to  0.000000
5/30/2012	12:19:32 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:19:32 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:19:32 PM	Tube furnace set to 0
5/30/2012	12:20:02 PM	H2 valve closed
5/30/2012	12:20:02 PM	BCl3 valve closed
5/30/2012	12:20:02 PM	PH3 valve closed
5/30/2012	12:20:02 PM	SiCl4 pre valve closed
5/30/2012	12:20:02 PM	SiCl4 post valve closed
5/30/2012	12:20:02 PM	Bypass valve closed
5/30/2012	12:20:02 PM	Bubbler valve closed
5/30/2012	12:20:02 PM	Helium valve opened
5/30/2012	12:20:02 PM	Main Vac valve opened
5/30/2012	12:20:02 PM	Helium MFC set to  20.000000
5/30/2012	12:20:02 PM	H2 MFC set to  0.000000
5/30/2012	12:20:02 PM	BCl3 MFC set to  0.000000
5/30/2012	12:20:02 PM	PH3 MFC set to  0.000000
5/30/2012	12:20:02 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:20:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:20:02 PM	Tube furnace set to 0
5/30/2012	12:20:33 PM	Helium valve closed
5/30/2012	12:20:33 PM	H2 valve closed
5/30/2012	12:20:33 PM	BCl3 valve closed
5/30/2012	12:20:33 PM	PH3 valve closed
5/30/2012	12:20:33 PM	SiCl4 pre valve closed
5/30/2012	12:20:33 PM	SiCl4 post valve closed
5/30/2012	12:20:33 PM	Bypass valve closed
5/30/2012	12:20:33 PM	Bubbler valve closed
5/30/2012	12:20:33 PM	Main Vac valve opened
5/30/2012	12:20:33 PM	Helium MFC set to  0.000000
5/30/2012	12:20:33 PM	H2 MFC set to  0.000000
5/30/2012	12:20:33 PM	BCl3 MFC set to  0.000000
5/30/2012	12:20:33 PM	PH3 MFC set to  0.000000
5/30/2012	12:20:33 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:20:33 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:20:33 PM	Tube furnace set to 0
5/30/2012	12:21:03 PM	H2 valve closed
5/30/2012	12:21:03 PM	BCl3 valve closed
5/30/2012	12:21:03 PM	PH3 valve closed
5/30/2012	12:21:03 PM	SiCl4 pre valve closed
5/30/2012	12:21:03 PM	SiCl4 post valve closed
5/30/2012	12:21:03 PM	Bypass valve closed
5/30/2012	12:21:03 PM	Bubbler valve closed
5/30/2012	12:21:03 PM	Helium valve opened
5/30/2012	12:21:03 PM	Main Vac valve opened
5/30/2012	12:21:03 PM	Helium MFC set to  20.000000
5/30/2012	12:21:03 PM	H2 MFC set to  0.000000
5/30/2012	12:21:03 PM	BCl3 MFC set to  0.000000
5/30/2012	12:21:03 PM	PH3 MFC set to  0.000000
5/30/2012	12:21:03 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:21:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:21:03 PM	Tube furnace set to 0
5/30/2012	12:21:33 PM	Helium valve closed
5/30/2012	12:21:33 PM	H2 valve closed
5/30/2012	12:21:33 PM	BCl3 valve closed
5/30/2012	12:21:33 PM	PH3 valve closed
5/30/2012	12:21:33 PM	SiCl4 pre valve closed
5/30/2012	12:21:33 PM	SiCl4 post valve closed
5/30/2012	12:21:33 PM	Bypass valve closed
5/30/2012	12:21:33 PM	Bubbler valve closed
5/30/2012	12:21:33 PM	Main Vac valve opened
5/30/2012	12:21:33 PM	Helium MFC set to  0.000000
5/30/2012	12:21:33 PM	H2 MFC set to  0.000000
5/30/2012	12:21:33 PM	BCl3 MFC set to  0.000000
5/30/2012	12:21:33 PM	PH3 MFC set to  0.000000
5/30/2012	12:21:33 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:21:33 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:21:33 PM	Tube furnace set to 0
5/30/2012	12:22:03 PM	H2 valve closed
5/30/2012	12:22:03 PM	BCl3 valve closed
5/30/2012	12:22:03 PM	PH3 valve closed
5/30/2012	12:22:03 PM	SiCl4 pre valve closed
5/30/2012	12:22:03 PM	SiCl4 post valve closed
5/30/2012	12:22:03 PM	Bypass valve closed
5/30/2012	12:22:03 PM	Bubbler valve closed
5/30/2012	12:22:03 PM	Helium valve opened
5/30/2012	12:22:03 PM	Main Vac valve opened
5/30/2012	12:22:03 PM	Helium MFC set to  20.000000
5/30/2012	12:22:03 PM	H2 MFC set to  0.000000
5/30/2012	12:22:03 PM	BCl3 MFC set to  0.000000
5/30/2012	12:22:03 PM	PH3 MFC set to  0.000000
5/30/2012	12:22:03 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:22:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:22:03 PM	Tube furnace set to 0
5/30/2012	12:22:33 PM	Helium valve closed
5/30/2012	12:22:33 PM	H2 valve closed
5/30/2012	12:22:33 PM	BCl3 valve closed
5/30/2012	12:22:33 PM	PH3 valve closed
5/30/2012	12:22:33 PM	SiCl4 pre valve closed
5/30/2012	12:22:33 PM	SiCl4 post valve closed
5/30/2012	12:22:33 PM	Bypass valve closed
5/30/2012	12:22:33 PM	Bubbler valve closed
5/30/2012	12:22:33 PM	Main Vac valve opened
5/30/2012	12:22:34 PM	Helium MFC set to  0.000000
5/30/2012	12:22:34 PM	H2 MFC set to  0.000000
5/30/2012	12:22:34 PM	BCl3 MFC set to  0.000000
5/30/2012	12:22:34 PM	PH3 MFC set to  0.000000
5/30/2012	12:22:34 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:22:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:22:34 PM	Tube furnace set to 0
5/30/2012	12:23:04 PM	H2 valve closed
5/30/2012	12:23:04 PM	BCl3 valve closed
5/30/2012	12:23:04 PM	PH3 valve closed
5/30/2012	12:23:04 PM	SiCl4 pre valve closed
5/30/2012	12:23:04 PM	SiCl4 post valve closed
5/30/2012	12:23:04 PM	Bypass valve closed
5/30/2012	12:23:04 PM	Bubbler valve closed
5/30/2012	12:23:04 PM	Helium valve opened
5/30/2012	12:23:04 PM	Main Vac valve opened
5/30/2012	12:23:04 PM	Helium MFC set to  20.000000
5/30/2012	12:23:04 PM	H2 MFC set to  0.000000
5/30/2012	12:23:04 PM	BCl3 MFC set to  0.000000
5/30/2012	12:23:04 PM	PH3 MFC set to  0.000000
5/30/2012	12:23:04 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:23:04 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:23:04 PM	Tube furnace set to 0
5/30/2012	12:23:34 PM	Helium valve closed
5/30/2012	12:23:34 PM	H2 valve closed
5/30/2012	12:23:34 PM	BCl3 valve closed
5/30/2012	12:23:34 PM	PH3 valve closed
5/30/2012	12:23:34 PM	SiCl4 pre valve closed
5/30/2012	12:23:34 PM	SiCl4 post valve closed
5/30/2012	12:23:34 PM	Bypass valve closed
5/30/2012	12:23:34 PM	Bubbler valve closed
5/30/2012	12:23:34 PM	Main Vac valve opened
5/30/2012	12:23:34 PM	Helium MFC set to  0.000000
5/30/2012	12:23:34 PM	H2 MFC set to  0.000000
5/30/2012	12:23:34 PM	BCl3 MFC set to  0.000000
5/30/2012	12:23:34 PM	PH3 MFC set to  0.000000
5/30/2012	12:23:34 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:23:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:23:34 PM	Tube furnace set to 0
5/30/2012	12:24:04 PM	H2 valve closed
5/30/2012	12:24:04 PM	BCl3 valve closed
5/30/2012	12:24:04 PM	PH3 valve closed
5/30/2012	12:24:04 PM	SiCl4 pre valve closed
5/30/2012	12:24:04 PM	SiCl4 post valve closed
5/30/2012	12:24:04 PM	Bypass valve closed
5/30/2012	12:24:04 PM	Bubbler valve closed
5/30/2012	12:24:04 PM	Helium valve opened
5/30/2012	12:24:04 PM	Main Vac valve opened
5/30/2012	12:24:04 PM	Helium MFC set to  20.000000
5/30/2012	12:24:04 PM	H2 MFC set to  0.000000
5/30/2012	12:24:04 PM	BCl3 MFC set to  0.000000
5/30/2012	12:24:04 PM	PH3 MFC set to  0.000000
5/30/2012	12:24:04 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:24:04 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:24:04 PM	Tube furnace set to 0
5/30/2012	12:24:34 PM	Helium valve closed
5/30/2012	12:24:34 PM	H2 valve closed
5/30/2012	12:24:34 PM	BCl3 valve closed
5/30/2012	12:24:34 PM	PH3 valve closed
5/30/2012	12:24:34 PM	SiCl4 pre valve closed
5/30/2012	12:24:34 PM	SiCl4 post valve closed
5/30/2012	12:24:34 PM	Bypass valve closed
5/30/2012	12:24:34 PM	Bubbler valve closed
5/30/2012	12:24:34 PM	Main Vac valve opened
5/30/2012	12:24:34 PM	Helium MFC set to  0.000000
5/30/2012	12:24:34 PM	H2 MFC set to  0.000000
5/30/2012	12:24:34 PM	BCl3 MFC set to  0.000000
5/30/2012	12:24:34 PM	PH3 MFC set to  0.000000
5/30/2012	12:24:34 PM	SiCl4 MFC set to  0.000000
5/30/2012	12:24:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	12:24:35 PM	Tube furnace set to 0
5/30/2012	12:24:36 PM	Run finished at 12:24 PM
5/30/2012	12:24:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/30/2012	1:10:50 PM	Main Vac valve closed
5/30/2012	1:11:04 PM	Main Vac valve opened
5/30/2012	1:11:49 PM	Main Vac valve closed
5/30/2012	1:12:03 PM	Main Vac valve opened
5/30/2012	1:12:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/30/2012	1:12:32 PM	Recipe started at 1:12 PM
5/30/2012	1:12:32 PM	Helium valve closed
5/30/2012	1:12:32 PM	H2 valve closed
5/30/2012	1:12:32 PM	BCl3 valve closed
5/30/2012	1:12:32 PM	PH3 valve closed
5/30/2012	1:12:32 PM	SiCl4 pre valve closed
5/30/2012	1:12:32 PM	SiCl4 post valve closed
5/30/2012	1:12:32 PM	Main Vac valve closed
5/30/2012	1:12:32 PM	Bubbler valve closed
5/30/2012	1:12:32 PM	Bypass valve opened
5/30/2012	1:12:32 PM	Helium MFC set to  0.000000
5/30/2012	1:12:32 PM	H2 MFC set to  0.000000
5/30/2012	1:12:32 PM	BCl3 MFC set to  0.000000
5/30/2012	1:12:32 PM	PH3 MFC set to  0.000000
5/30/2012	1:12:32 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:12:32 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:12:32 PM	Tube furnace set to 0
5/30/2012	1:12:33 PM	Helium valve closed
5/30/2012	1:12:33 PM	H2 valve closed
5/30/2012	1:12:33 PM	BCl3 valve closed
5/30/2012	1:12:33 PM	PH3 valve closed
5/30/2012	1:12:33 PM	SiCl4 pre valve closed
5/30/2012	1:12:33 PM	SiCl4 post valve closed
5/30/2012	1:12:33 PM	Main Vac valve closed
5/30/2012	1:12:33 PM	Bubbler valve closed
5/30/2012	1:12:33 PM	Bypass valve opened
5/30/2012	1:12:33 PM	Helium MFC set to  0.000000
5/30/2012	1:12:33 PM	H2 MFC set to  0.000000
5/30/2012	1:12:33 PM	BCl3 MFC set to  0.000000
5/30/2012	1:12:33 PM	PH3 MFC set to  0.000000
5/30/2012	1:12:33 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:12:33 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:12:33 PM	Tube furnace set to 0
5/30/2012	1:13:03 PM	Helium valve closed
5/30/2012	1:13:03 PM	H2 valve closed
5/30/2012	1:13:03 PM	BCl3 valve closed
5/30/2012	1:13:03 PM	PH3 valve closed
5/30/2012	1:13:03 PM	SiCl4 pre valve closed
5/30/2012	1:13:03 PM	SiCl4 post valve closed
5/30/2012	1:13:03 PM	Bypass valve closed
5/30/2012	1:13:03 PM	Bubbler valve closed
5/30/2012	1:13:03 PM	Main Vac valve opened
5/30/2012	1:13:03 PM	Helium MFC set to  0.000000
5/30/2012	1:13:03 PM	H2 MFC set to  0.000000
5/30/2012	1:13:03 PM	BCl3 MFC set to  0.000000
5/30/2012	1:13:03 PM	PH3 MFC set to  0.000000
5/30/2012	1:13:03 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:13:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:13:03 PM	Tube furnace set to 0
5/30/2012	1:13:33 PM	H2 valve closed
5/30/2012	1:13:33 PM	BCl3 valve closed
5/30/2012	1:13:33 PM	PH3 valve closed
5/30/2012	1:13:33 PM	SiCl4 pre valve closed
5/30/2012	1:13:33 PM	SiCl4 post valve closed
5/30/2012	1:13:33 PM	Bypass valve closed
5/30/2012	1:13:33 PM	Bubbler valve closed
5/30/2012	1:13:33 PM	Helium valve opened
5/30/2012	1:13:33 PM	Main Vac valve opened
5/30/2012	1:13:33 PM	Helium MFC set to  20.000000
5/30/2012	1:13:33 PM	H2 MFC set to  0.000000
5/30/2012	1:13:33 PM	BCl3 MFC set to  0.000000
5/30/2012	1:13:33 PM	PH3 MFC set to  0.000000
5/30/2012	1:13:33 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:13:33 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:13:33 PM	Tube furnace set to 0
5/30/2012	1:14:03 PM	Helium valve closed
5/30/2012	1:14:03 PM	H2 valve closed
5/30/2012	1:14:03 PM	BCl3 valve closed
5/30/2012	1:14:03 PM	PH3 valve closed
5/30/2012	1:14:03 PM	SiCl4 pre valve closed
5/30/2012	1:14:03 PM	SiCl4 post valve closed
5/30/2012	1:14:03 PM	Bypass valve closed
5/30/2012	1:14:03 PM	Bubbler valve closed
5/30/2012	1:14:03 PM	Main Vac valve opened
5/30/2012	1:14:03 PM	Helium MFC set to  0.000000
5/30/2012	1:14:03 PM	H2 MFC set to  0.000000
5/30/2012	1:14:03 PM	BCl3 MFC set to  0.000000
5/30/2012	1:14:03 PM	PH3 MFC set to  0.000000
5/30/2012	1:14:03 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:14:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:14:03 PM	Tube furnace set to 0
5/30/2012	1:14:34 PM	H2 valve closed
5/30/2012	1:14:34 PM	BCl3 valve closed
5/30/2012	1:14:34 PM	PH3 valve closed
5/30/2012	1:14:34 PM	SiCl4 pre valve closed
5/30/2012	1:14:34 PM	SiCl4 post valve closed
5/30/2012	1:14:34 PM	Bypass valve closed
5/30/2012	1:14:34 PM	Bubbler valve closed
5/30/2012	1:14:34 PM	Helium valve opened
5/30/2012	1:14:34 PM	Main Vac valve opened
5/30/2012	1:14:34 PM	Helium MFC set to  20.000000
5/30/2012	1:14:34 PM	H2 MFC set to  0.000000
5/30/2012	1:14:34 PM	BCl3 MFC set to  0.000000
5/30/2012	1:14:34 PM	PH3 MFC set to  0.000000
5/30/2012	1:14:34 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:14:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:14:34 PM	Tube furnace set to 0
5/30/2012	1:15:04 PM	Helium valve closed
5/30/2012	1:15:04 PM	H2 valve closed
5/30/2012	1:15:04 PM	BCl3 valve closed
5/30/2012	1:15:04 PM	PH3 valve closed
5/30/2012	1:15:04 PM	SiCl4 pre valve closed
5/30/2012	1:15:04 PM	SiCl4 post valve closed
5/30/2012	1:15:04 PM	Bypass valve closed
5/30/2012	1:15:04 PM	Bubbler valve closed
5/30/2012	1:15:04 PM	Main Vac valve opened
5/30/2012	1:15:04 PM	Helium MFC set to  0.000000
5/30/2012	1:15:04 PM	H2 MFC set to  0.000000
5/30/2012	1:15:04 PM	BCl3 MFC set to  0.000000
5/30/2012	1:15:04 PM	PH3 MFC set to  0.000000
5/30/2012	1:15:04 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:15:04 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:15:04 PM	Tube furnace set to 0
5/30/2012	1:15:34 PM	H2 valve closed
5/30/2012	1:15:34 PM	BCl3 valve closed
5/30/2012	1:15:34 PM	PH3 valve closed
5/30/2012	1:15:34 PM	SiCl4 pre valve closed
5/30/2012	1:15:34 PM	SiCl4 post valve closed
5/30/2012	1:15:34 PM	Bypass valve closed
5/30/2012	1:15:34 PM	Bubbler valve closed
5/30/2012	1:15:34 PM	Helium valve opened
5/30/2012	1:15:34 PM	Main Vac valve opened
5/30/2012	1:15:34 PM	Helium MFC set to  20.000000
5/30/2012	1:15:34 PM	H2 MFC set to  0.000000
5/30/2012	1:15:34 PM	BCl3 MFC set to  0.000000
5/30/2012	1:15:34 PM	PH3 MFC set to  0.000000
5/30/2012	1:15:34 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:15:34 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:15:34 PM	Tube furnace set to 0
5/30/2012	1:16:04 PM	Helium valve closed
5/30/2012	1:16:04 PM	H2 valve closed
5/30/2012	1:16:04 PM	BCl3 valve closed
5/30/2012	1:16:04 PM	PH3 valve closed
5/30/2012	1:16:04 PM	SiCl4 pre valve closed
5/30/2012	1:16:04 PM	SiCl4 post valve closed
5/30/2012	1:16:04 PM	Bypass valve closed
5/30/2012	1:16:04 PM	Bubbler valve closed
5/30/2012	1:16:04 PM	Main Vac valve opened
5/30/2012	1:16:04 PM	Helium MFC set to  0.000000
5/30/2012	1:16:04 PM	H2 MFC set to  0.000000
5/30/2012	1:16:04 PM	BCl3 MFC set to  0.000000
5/30/2012	1:16:04 PM	PH3 MFC set to  0.000000
5/30/2012	1:16:04 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:16:04 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:16:04 PM	Tube furnace set to 0
5/30/2012	1:16:34 PM	H2 valve closed
5/30/2012	1:16:34 PM	BCl3 valve closed
5/30/2012	1:16:34 PM	PH3 valve closed
5/30/2012	1:16:34 PM	SiCl4 pre valve closed
5/30/2012	1:16:35 PM	SiCl4 post valve closed
5/30/2012	1:16:35 PM	Bypass valve closed
5/30/2012	1:16:35 PM	Bubbler valve closed
5/30/2012	1:16:35 PM	Helium valve opened
5/30/2012	1:16:35 PM	Main Vac valve opened
5/30/2012	1:16:35 PM	Helium MFC set to  20.000000
5/30/2012	1:16:35 PM	H2 MFC set to  0.000000
5/30/2012	1:16:35 PM	BCl3 MFC set to  0.000000
5/30/2012	1:16:35 PM	PH3 MFC set to  0.000000
5/30/2012	1:16:35 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:16:35 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:16:35 PM	Tube furnace set to 0
5/30/2012	1:17:05 PM	Helium valve closed
5/30/2012	1:17:05 PM	H2 valve closed
5/30/2012	1:17:05 PM	BCl3 valve closed
5/30/2012	1:17:05 PM	PH3 valve closed
5/30/2012	1:17:05 PM	SiCl4 pre valve closed
5/30/2012	1:17:05 PM	SiCl4 post valve closed
5/30/2012	1:17:05 PM	Bypass valve closed
5/30/2012	1:17:05 PM	Bubbler valve closed
5/30/2012	1:17:05 PM	Main Vac valve opened
5/30/2012	1:17:05 PM	Helium MFC set to  0.000000
5/30/2012	1:17:05 PM	H2 MFC set to  0.000000
5/30/2012	1:17:05 PM	BCl3 MFC set to  0.000000
5/30/2012	1:17:05 PM	PH3 MFC set to  0.000000
5/30/2012	1:17:05 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:17:05 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:17:05 PM	Tube furnace set to 0
5/30/2012	1:17:35 PM	H2 valve closed
5/30/2012	1:17:35 PM	BCl3 valve closed
5/30/2012	1:17:35 PM	PH3 valve closed
5/30/2012	1:17:35 PM	SiCl4 pre valve closed
5/30/2012	1:17:35 PM	SiCl4 post valve closed
5/30/2012	1:17:35 PM	Bypass valve closed
5/30/2012	1:17:35 PM	Bubbler valve closed
5/30/2012	1:17:35 PM	Helium valve opened
5/30/2012	1:17:35 PM	Main Vac valve opened
5/30/2012	1:17:35 PM	Helium MFC set to  20.000000
5/30/2012	1:17:35 PM	H2 MFC set to  0.000000
5/30/2012	1:17:35 PM	BCl3 MFC set to  0.000000
5/30/2012	1:17:35 PM	PH3 MFC set to  0.000000
5/30/2012	1:17:35 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:17:35 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:17:35 PM	Tube furnace set to 0
5/30/2012	1:18:05 PM	Helium valve closed
5/30/2012	1:18:05 PM	H2 valve closed
5/30/2012	1:18:05 PM	BCl3 valve closed
5/30/2012	1:18:05 PM	PH3 valve closed
5/30/2012	1:18:05 PM	SiCl4 pre valve closed
5/30/2012	1:18:05 PM	SiCl4 post valve closed
5/30/2012	1:18:05 PM	Bypass valve closed
5/30/2012	1:18:05 PM	Bubbler valve closed
5/30/2012	1:18:05 PM	Main Vac valve opened
5/30/2012	1:18:05 PM	Helium MFC set to  0.000000
5/30/2012	1:18:05 PM	H2 MFC set to  0.000000
5/30/2012	1:18:05 PM	BCl3 MFC set to  0.000000
5/30/2012	1:18:05 PM	PH3 MFC set to  0.000000
5/30/2012	1:18:05 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:18:05 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:18:05 PM	Tube furnace set to 0
5/30/2012	1:18:35 PM	H2 valve closed
5/30/2012	1:18:35 PM	BCl3 valve closed
5/30/2012	1:18:35 PM	PH3 valve closed
5/30/2012	1:18:35 PM	SiCl4 pre valve closed
5/30/2012	1:18:35 PM	SiCl4 post valve closed
5/30/2012	1:18:35 PM	Bypass valve closed
5/30/2012	1:18:35 PM	Bubbler valve closed
5/30/2012	1:18:35 PM	Helium valve opened
5/30/2012	1:18:35 PM	Main Vac valve opened
5/30/2012	1:18:35 PM	Helium MFC set to  20.000000
5/30/2012	1:18:35 PM	H2 MFC set to  0.000000
5/30/2012	1:18:35 PM	BCl3 MFC set to  0.000000
5/30/2012	1:18:35 PM	PH3 MFC set to  0.000000
5/30/2012	1:18:35 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:18:35 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:18:36 PM	Tube furnace set to 0
5/30/2012	1:19:06 PM	Helium valve closed
5/30/2012	1:19:06 PM	H2 valve closed
5/30/2012	1:19:06 PM	BCl3 valve closed
5/30/2012	1:19:06 PM	PH3 valve closed
5/30/2012	1:19:06 PM	SiCl4 pre valve closed
5/30/2012	1:19:06 PM	SiCl4 post valve closed
5/30/2012	1:19:06 PM	Bypass valve closed
5/30/2012	1:19:06 PM	Bubbler valve closed
5/30/2012	1:19:06 PM	Main Vac valve opened
5/30/2012	1:19:06 PM	Helium MFC set to  0.000000
5/30/2012	1:19:06 PM	H2 MFC set to  0.000000
5/30/2012	1:19:06 PM	BCl3 MFC set to  0.000000
5/30/2012	1:19:06 PM	PH3 MFC set to  0.000000
5/30/2012	1:19:06 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:19:06 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:19:06 PM	Tube furnace set to 0
5/30/2012	1:19:36 PM	H2 valve closed
5/30/2012	1:19:36 PM	BCl3 valve closed
5/30/2012	1:19:36 PM	PH3 valve closed
5/30/2012	1:19:36 PM	SiCl4 pre valve closed
5/30/2012	1:19:36 PM	SiCl4 post valve closed
5/30/2012	1:19:36 PM	Bypass valve closed
5/30/2012	1:19:36 PM	Bubbler valve closed
5/30/2012	1:19:36 PM	Helium valve opened
5/30/2012	1:19:36 PM	Main Vac valve opened
5/30/2012	1:19:36 PM	Helium MFC set to  20.000000
5/30/2012	1:19:36 PM	H2 MFC set to  0.000000
5/30/2012	1:19:36 PM	BCl3 MFC set to  0.000000
5/30/2012	1:19:36 PM	PH3 MFC set to  0.000000
5/30/2012	1:19:36 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:19:36 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:19:36 PM	Tube furnace set to 0
5/30/2012	1:20:06 PM	Helium valve closed
5/30/2012	1:20:06 PM	H2 valve closed
5/30/2012	1:20:06 PM	BCl3 valve closed
5/30/2012	1:20:06 PM	PH3 valve closed
5/30/2012	1:20:06 PM	SiCl4 pre valve closed
5/30/2012	1:20:06 PM	SiCl4 post valve closed
5/30/2012	1:20:06 PM	Bypass valve closed
5/30/2012	1:20:06 PM	Bubbler valve closed
5/30/2012	1:20:06 PM	Main Vac valve opened
5/30/2012	1:20:06 PM	Helium MFC set to  0.000000
5/30/2012	1:20:06 PM	H2 MFC set to  0.000000
5/30/2012	1:20:06 PM	BCl3 MFC set to  0.000000
5/30/2012	1:20:06 PM	PH3 MFC set to  0.000000
5/30/2012	1:20:06 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:20:06 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:20:06 PM	Tube furnace set to 0
5/30/2012	1:20:36 PM	H2 valve closed
5/30/2012	1:20:36 PM	BCl3 valve closed
5/30/2012	1:20:36 PM	PH3 valve closed
5/30/2012	1:20:36 PM	SiCl4 pre valve closed
5/30/2012	1:20:36 PM	SiCl4 post valve closed
5/30/2012	1:20:36 PM	Bypass valve closed
5/30/2012	1:20:36 PM	Bubbler valve closed
5/30/2012	1:20:36 PM	Helium valve opened
5/30/2012	1:20:36 PM	Main Vac valve opened
5/30/2012	1:20:36 PM	Helium MFC set to  20.000000
5/30/2012	1:20:36 PM	H2 MFC set to  0.000000
5/30/2012	1:20:36 PM	BCl3 MFC set to  0.000000
5/30/2012	1:20:36 PM	PH3 MFC set to  0.000000
5/30/2012	1:20:36 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:20:36 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:20:37 PM	Tube furnace set to 0
5/30/2012	1:21:07 PM	Helium valve closed
5/30/2012	1:21:07 PM	H2 valve closed
5/30/2012	1:21:07 PM	BCl3 valve closed
5/30/2012	1:21:07 PM	PH3 valve closed
5/30/2012	1:21:07 PM	SiCl4 pre valve closed
5/30/2012	1:21:07 PM	SiCl4 post valve closed
5/30/2012	1:21:07 PM	Bypass valve closed
5/30/2012	1:21:07 PM	Bubbler valve closed
5/30/2012	1:21:07 PM	Main Vac valve opened
5/30/2012	1:21:07 PM	Helium MFC set to  0.000000
5/30/2012	1:21:07 PM	H2 MFC set to  0.000000
5/30/2012	1:21:07 PM	BCl3 MFC set to  0.000000
5/30/2012	1:21:07 PM	PH3 MFC set to  0.000000
5/30/2012	1:21:07 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:21:07 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:21:07 PM	Tube furnace set to 0
5/30/2012	1:21:37 PM	H2 valve closed
5/30/2012	1:21:37 PM	BCl3 valve closed
5/30/2012	1:21:37 PM	PH3 valve closed
5/30/2012	1:21:37 PM	SiCl4 pre valve closed
5/30/2012	1:21:37 PM	SiCl4 post valve closed
5/30/2012	1:21:37 PM	Bypass valve closed
5/30/2012	1:21:37 PM	Bubbler valve closed
5/30/2012	1:21:37 PM	Helium valve opened
5/30/2012	1:21:37 PM	Main Vac valve opened
5/30/2012	1:21:37 PM	Helium MFC set to  20.000000
5/30/2012	1:21:37 PM	H2 MFC set to  0.000000
5/30/2012	1:21:37 PM	BCl3 MFC set to  0.000000
5/30/2012	1:21:37 PM	PH3 MFC set to  0.000000
5/30/2012	1:21:37 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:21:37 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:21:37 PM	Tube furnace set to 0
5/30/2012	1:22:07 PM	Helium valve closed
5/30/2012	1:22:07 PM	H2 valve closed
5/30/2012	1:22:07 PM	BCl3 valve closed
5/30/2012	1:22:07 PM	PH3 valve closed
5/30/2012	1:22:07 PM	SiCl4 pre valve closed
5/30/2012	1:22:07 PM	SiCl4 post valve closed
5/30/2012	1:22:07 PM	Bypass valve closed
5/30/2012	1:22:07 PM	Bubbler valve closed
5/30/2012	1:22:07 PM	Main Vac valve opened
5/30/2012	1:22:07 PM	Helium MFC set to  0.000000
5/30/2012	1:22:07 PM	H2 MFC set to  0.000000
5/30/2012	1:22:07 PM	BCl3 MFC set to  0.000000
5/30/2012	1:22:07 PM	PH3 MFC set to  0.000000
5/30/2012	1:22:07 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:22:07 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:22:07 PM	Tube furnace set to 0
5/30/2012	1:22:37 PM	H2 valve closed
5/30/2012	1:22:37 PM	BCl3 valve closed
5/30/2012	1:22:37 PM	PH3 valve closed
5/30/2012	1:22:37 PM	SiCl4 pre valve closed
5/30/2012	1:22:37 PM	SiCl4 post valve closed
5/30/2012	1:22:37 PM	Bypass valve closed
5/30/2012	1:22:37 PM	Bubbler valve closed
5/30/2012	1:22:37 PM	Helium valve opened
5/30/2012	1:22:37 PM	Main Vac valve opened
5/30/2012	1:22:37 PM	Helium MFC set to  20.000000
5/30/2012	1:22:37 PM	H2 MFC set to  0.000000
5/30/2012	1:22:37 PM	BCl3 MFC set to  0.000000
5/30/2012	1:22:37 PM	PH3 MFC set to  0.000000
5/30/2012	1:22:37 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:22:37 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:22:38 PM	Tube furnace set to 0
5/30/2012	1:23:08 PM	Helium valve closed
5/30/2012	1:23:08 PM	H2 valve closed
5/30/2012	1:23:08 PM	BCl3 valve closed
5/30/2012	1:23:08 PM	PH3 valve closed
5/30/2012	1:23:08 PM	SiCl4 pre valve closed
5/30/2012	1:23:08 PM	SiCl4 post valve closed
5/30/2012	1:23:08 PM	Bypass valve closed
5/30/2012	1:23:08 PM	Bubbler valve closed
5/30/2012	1:23:08 PM	Main Vac valve opened
5/30/2012	1:23:08 PM	Helium MFC set to  0.000000
5/30/2012	1:23:08 PM	H2 MFC set to  0.000000
5/30/2012	1:23:08 PM	BCl3 MFC set to  0.000000
5/30/2012	1:23:08 PM	PH3 MFC set to  0.000000
5/30/2012	1:23:08 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:23:08 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:23:08 PM	Tube furnace set to 0
5/30/2012	1:23:09 PM	Run finished at 1:23 PM
5/30/2012	1:23:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/30/2012	1:27:01 PM	Main Vac valve closed
5/30/2012	1:27:13 PM	Main Vac valve opened
5/30/2012	1:27:45 PM	Recipe started at 1:27 PM
5/30/2012	1:27:45 PM	Helium valve closed
5/30/2012	1:27:45 PM	H2 valve closed
5/30/2012	1:27:45 PM	BCl3 valve closed
5/30/2012	1:27:45 PM	PH3 valve closed
5/30/2012	1:27:45 PM	SiCl4 pre valve closed
5/30/2012	1:27:45 PM	SiCl4 post valve closed
5/30/2012	1:27:45 PM	Main Vac valve closed
5/30/2012	1:27:45 PM	Bypass valve closed
5/30/2012	1:27:45 PM	Bubbler valve closed
5/30/2012	1:27:45 PM	Helium MFC set to  0.000000
5/30/2012	1:27:45 PM	H2 MFC set to  0.000000
5/30/2012	1:27:45 PM	BCl3 MFC set to  0.000000
5/30/2012	1:27:45 PM	PH3 MFC set to  0.000000
5/30/2012	1:27:45 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:27:45 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:27:45 PM	Tube furnace set to 0
5/30/2012	1:27:48 PM	Helium valve closed
5/30/2012	1:27:48 PM	BCl3 valve closed
5/30/2012	1:27:48 PM	PH3 valve closed
5/30/2012	1:27:48 PM	SiCl4 pre valve closed
5/30/2012	1:27:48 PM	SiCl4 post valve closed
5/30/2012	1:27:48 PM	Main Vac valve closed
5/30/2012	1:27:48 PM	Bypass valve closed
5/30/2012	1:27:48 PM	Bubbler valve closed
5/30/2012	1:27:48 PM	H2 valve opened
5/30/2012	1:27:48 PM	Helium MFC set to  0.000000
5/30/2012	1:27:48 PM	H2 MFC set to  500.000000
5/30/2012	1:27:48 PM	BCl3 MFC set to  0.000000
5/30/2012	1:27:48 PM	PH3 MFC set to  0.000000
5/30/2012	1:27:48 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:27:48 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:27:48 PM	Tube furnace set to 50
5/30/2012	1:29:01 PM	Helium valve closed
5/30/2012	1:29:01 PM	BCl3 valve closed
5/30/2012	1:29:01 PM	PH3 valve closed
5/30/2012	1:29:01 PM	SiCl4 pre valve closed
5/30/2012	1:29:01 PM	SiCl4 post valve closed
5/30/2012	1:29:01 PM	Main Vac valve closed
5/30/2012	1:29:01 PM	Bypass valve closed
5/30/2012	1:29:01 PM	H2 valve opened
5/30/2012	1:29:01 PM	Bubbler valve opened
5/30/2012	1:29:01 PM	Helium MFC set to  0.000000
5/30/2012	1:29:01 PM	H2 MFC set to  500.000000
5/30/2012	1:29:01 PM	BCl3 MFC set to  0.000000
5/30/2012	1:29:01 PM	PH3 MFC set to  0.000000
5/30/2012	1:29:01 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:29:01 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:29:01 PM	Tube furnace set to 50
5/30/2012	1:29:02 PM	Helium valve closed
5/30/2012	1:29:02 PM	BCl3 valve closed
5/30/2012	1:29:02 PM	PH3 valve closed
5/30/2012	1:29:02 PM	SiCl4 pre valve closed
5/30/2012	1:29:02 PM	SiCl4 post valve closed
5/30/2012	1:29:02 PM	Main Vac valve closed
5/30/2012	1:29:02 PM	Bypass valve closed
5/30/2012	1:29:02 PM	H2 valve opened
5/30/2012	1:29:02 PM	Bubbler valve opened
5/30/2012	1:29:02 PM	Helium MFC set to  0.000000
5/30/2012	1:29:02 PM	H2 MFC set to  500.000000
5/30/2012	1:29:02 PM	BCl3 MFC set to  0.000000
5/30/2012	1:29:02 PM	PH3 MFC set to  0.000000
5/30/2012	1:29:02 PM	SiCl4 MFC set to  0.000000
5/30/2012	1:29:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:29:02 PM	Tube furnace set to 1000
5/30/2012	1:49:02 PM	Helium valve closed
5/30/2012	1:49:02 PM	BCl3 valve closed
5/30/2012	1:49:02 PM	Main Vac valve closed
5/30/2012	1:49:02 PM	Bypass valve closed
5/30/2012	1:49:02 PM	H2 valve opened
5/30/2012	1:49:02 PM	PH3 valve opened
5/30/2012	1:49:02 PM	SiCl4 pre valve opened
5/30/2012	1:49:02 PM	SiCl4 post valve opened
5/30/2012	1:49:02 PM	Bubbler valve opened
5/30/2012	1:49:02 PM	Helium MFC set to  0.000000
5/30/2012	1:49:02 PM	H2 MFC set to  500.000000
5/30/2012	1:49:02 PM	BCl3 MFC set to  0.000000
5/30/2012	1:49:02 PM	PH3 MFC set to  0.300000
5/30/2012	1:49:02 PM	SiCl4 MFC set to  50.000000
5/30/2012	1:49:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	1:49:02 PM	Tube furnace set to 1000
5/30/2012	2:09:02 PM	Helium valve closed
5/30/2012	2:09:02 PM	BCl3 valve closed
5/30/2012	2:09:02 PM	PH3 valve closed
5/30/2012	2:09:02 PM	SiCl4 pre valve closed
5/30/2012	2:09:02 PM	SiCl4 post valve closed
5/30/2012	2:09:02 PM	Main Vac valve closed
5/30/2012	2:09:02 PM	Bypass valve closed
5/30/2012	2:09:02 PM	H2 valve opened
5/30/2012	2:09:02 PM	Bubbler valve opened
5/30/2012	2:09:02 PM	Helium MFC set to  0.000000
5/30/2012	2:09:02 PM	H2 MFC set to  500.000000
5/30/2012	2:09:02 PM	BCl3 MFC set to  0.000000
5/30/2012	2:09:02 PM	PH3 MFC set to  0.000000
5/30/2012	2:09:02 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:09:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:09:03 PM	Tube furnace set to 950
5/30/2012	2:12:03 PM	H2 valve closed
5/30/2012	2:12:03 PM	BCl3 valve closed
5/30/2012	2:12:03 PM	PH3 valve closed
5/30/2012	2:12:03 PM	SiCl4 pre valve closed
5/30/2012	2:12:03 PM	SiCl4 post valve closed
5/30/2012	2:12:03 PM	Main Vac valve closed
5/30/2012	2:12:03 PM	Bypass valve closed
5/30/2012	2:12:03 PM	Helium valve opened
5/30/2012	2:12:03 PM	Bubbler valve opened
5/30/2012	2:12:03 PM	Helium MFC set to  500.000000
5/30/2012	2:12:03 PM	H2 MFC set to  0.000000
5/30/2012	2:12:03 PM	BCl3 MFC set to  0.000000
5/30/2012	2:12:03 PM	PH3 MFC set to  0.000000
5/30/2012	2:12:03 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:12:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:12:03 PM	Tube furnace set to 900
5/30/2012	2:15:03 PM	H2 valve closed
5/30/2012	2:15:03 PM	BCl3 valve closed
5/30/2012	2:15:03 PM	PH3 valve closed
5/30/2012	2:15:03 PM	SiCl4 pre valve closed
5/30/2012	2:15:03 PM	SiCl4 post valve closed
5/30/2012	2:15:03 PM	Main Vac valve closed
5/30/2012	2:15:03 PM	Bypass valve closed
5/30/2012	2:15:03 PM	Helium valve opened
5/30/2012	2:15:03 PM	Bubbler valve opened
5/30/2012	2:15:03 PM	Helium MFC set to  500.000000
5/30/2012	2:15:03 PM	H2 MFC set to  0.000000
5/30/2012	2:15:03 PM	BCl3 MFC set to  0.000000
5/30/2012	2:15:03 PM	PH3 MFC set to  0.000000
5/30/2012	2:15:03 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:15:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:15:03 PM	Tube furnace set to 850
5/30/2012	2:18:03 PM	H2 valve closed
5/30/2012	2:18:03 PM	BCl3 valve closed
5/30/2012	2:18:03 PM	PH3 valve closed
5/30/2012	2:18:03 PM	SiCl4 pre valve closed
5/30/2012	2:18:03 PM	SiCl4 post valve closed
5/30/2012	2:18:03 PM	Main Vac valve closed
5/30/2012	2:18:03 PM	Bypass valve closed
5/30/2012	2:18:03 PM	Helium valve opened
5/30/2012	2:18:03 PM	Bubbler valve opened
5/30/2012	2:18:03 PM	Helium MFC set to  500.000000
5/30/2012	2:18:03 PM	H2 MFC set to  0.000000
5/30/2012	2:18:03 PM	BCl3 MFC set to  0.000000
5/30/2012	2:18:03 PM	PH3 MFC set to  0.000000
5/30/2012	2:18:03 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:18:03 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:18:03 PM	Tube furnace set to 800
5/30/2012	2:18:27 PM	H2 valve closed
5/30/2012	2:18:27 PM	BCl3 valve closed
5/30/2012	2:18:27 PM	PH3 valve closed
5/30/2012	2:18:27 PM	SiCl4 pre valve closed
5/30/2012	2:18:27 PM	SiCl4 post valve closed
5/30/2012	2:18:27 PM	Main Vac valve closed
5/30/2012	2:18:27 PM	Bypass valve closed
5/30/2012	2:18:27 PM	Helium valve opened
5/30/2012	2:18:27 PM	Bubbler valve opened
5/30/2012	2:18:27 PM	Helium MFC set to  500.000000
5/30/2012	2:18:27 PM	H2 MFC set to  0.000000
5/30/2012	2:18:27 PM	BCl3 MFC set to  0.000000
5/30/2012	2:18:27 PM	PH3 MFC set to  0.000000
5/30/2012	2:18:27 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:18:27 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:18:27 PM	Tube furnace set to 750
5/30/2012	2:20:16 PM	H2 valve closed
5/30/2012	2:20:16 PM	BCl3 valve closed
5/30/2012	2:20:16 PM	PH3 valve closed
5/30/2012	2:20:16 PM	SiCl4 pre valve closed
5/30/2012	2:20:16 PM	SiCl4 post valve closed
5/30/2012	2:20:16 PM	Main Vac valve closed
5/30/2012	2:20:16 PM	Bypass valve closed
5/30/2012	2:20:16 PM	Helium valve opened
5/30/2012	2:20:16 PM	Bubbler valve opened
5/30/2012	2:20:16 PM	Helium MFC set to  500.000000
5/30/2012	2:20:16 PM	H2 MFC set to  0.000000
5/30/2012	2:20:16 PM	BCl3 MFC set to  0.000000
5/30/2012	2:20:16 PM	PH3 MFC set to  0.000000
5/30/2012	2:20:16 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:20:16 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:20:16 PM	Tube furnace set to 0
5/30/2012	2:22:57 PM	Run aborted at 2:22 PM
5/30/2012	2:22:57 PM	Helium valve closed
5/30/2012	2:22:57 PM	H2 valve closed
5/30/2012	2:22:57 PM	BCl3 valve closed
5/30/2012	2:22:57 PM	PH3 valve closed
5/30/2012	2:22:57 PM	SiCl4 pre valve closed
5/30/2012	2:22:57 PM	SiCl4 post valve closed
5/30/2012	2:22:57 PM	Bypass valve closed
5/30/2012	2:22:57 PM	Main Vac valve closed
5/30/2012	2:22:57 PM	Bubbler valve closed
5/30/2012	2:22:57 PM	Helium MFC set to  0.000000
5/30/2012	2:22:57 PM	H2 MFC set to  0.000000
5/30/2012	2:22:57 PM	BCl3 MFC set to  0.000000
5/30/2012	2:22:57 PM	PH3 MFC set to  0.000000
5/30/2012	2:22:57 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:22:57 PM	Tube furnace set to 0
5/30/2012	2:23:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2012	2:23:02 PM	Recipe started at 2:23 PM
5/30/2012	2:23:02 PM	Helium valve closed
5/30/2012	2:23:02 PM	H2 valve closed
5/30/2012	2:23:02 PM	BCl3 valve closed
5/30/2012	2:23:02 PM	PH3 valve closed
5/30/2012	2:23:02 PM	SiCl4 pre valve closed
5/30/2012	2:23:02 PM	SiCl4 post valve closed
5/30/2012	2:23:02 PM	Main Vac valve closed
5/30/2012	2:23:02 PM	Bypass valve closed
5/30/2012	2:23:02 PM	Bubbler valve closed
5/30/2012	2:23:02 PM	Helium MFC set to  0.000000
5/30/2012	2:23:02 PM	H2 MFC set to  0.000000
5/30/2012	2:23:02 PM	BCl3 MFC set to  0.000000
5/30/2012	2:23:02 PM	PH3 MFC set to  0.000000
5/30/2012	2:23:02 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:23:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:23:02 PM	Tube furnace set to 0
5/30/2012	2:23:05 PM	H2 valve closed
5/30/2012	2:23:05 PM	BCl3 valve closed
5/30/2012	2:23:05 PM	PH3 valve closed
5/30/2012	2:23:05 PM	SiCl4 pre valve closed
5/30/2012	2:23:05 PM	SiCl4 post valve closed
5/30/2012	2:23:05 PM	Main Vac valve closed
5/30/2012	2:23:05 PM	Bypass valve closed
5/30/2012	2:23:05 PM	Bubbler valve closed
5/30/2012	2:23:05 PM	Helium valve opened
5/30/2012	2:23:05 PM	Helium MFC set to  500.000000
5/30/2012	2:23:05 PM	H2 MFC set to  0.000000
5/30/2012	2:23:05 PM	BCl3 MFC set to  0.000000
5/30/2012	2:23:05 PM	PH3 MFC set to  0.000000
5/30/2012	2:23:05 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:23:05 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:23:05 PM	Tube furnace set to 0
5/30/2012	2:23:06 PM	Helium valve closed
5/30/2012	2:23:06 PM	H2 valve closed
5/30/2012	2:23:06 PM	BCl3 valve closed
5/30/2012	2:23:06 PM	PH3 valve closed
5/30/2012	2:23:06 PM	SiCl4 pre valve closed
5/30/2012	2:23:06 PM	SiCl4 post valve closed
5/30/2012	2:23:06 PM	Main Vac valve closed
5/30/2012	2:23:06 PM	Bypass valve closed
5/30/2012	2:23:06 PM	Bubbler valve closed
5/30/2012	2:23:06 PM	Helium MFC set to  0.000000
5/30/2012	2:23:06 PM	H2 MFC set to  0.000000
5/30/2012	2:23:06 PM	BCl3 MFC set to  0.000000
5/30/2012	2:23:06 PM	PH3 MFC set to  0.000000
5/30/2012	2:23:06 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:23:06 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:23:06 PM	Tube furnace set to 0
5/30/2012	2:23:07 PM	Run finished at 2:23 PM
5/30/2012	2:23:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2012	2:28:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2012	2:28:31 PM	Recipe started at 2:28 PM
5/30/2012	2:28:31 PM	Helium valve closed
5/30/2012	2:28:31 PM	H2 valve closed
5/30/2012	2:28:31 PM	BCl3 valve closed
5/30/2012	2:28:31 PM	PH3 valve closed
5/30/2012	2:28:31 PM	SiCl4 pre valve closed
5/30/2012	2:28:31 PM	SiCl4 post valve closed
5/30/2012	2:28:31 PM	Main Vac valve closed
5/30/2012	2:28:31 PM	Bubbler valve closed
5/30/2012	2:28:31 PM	Bypass valve opened
5/30/2012	2:28:31 PM	Helium MFC set to  0.000000
5/30/2012	2:28:31 PM	H2 MFC set to  0.000000
5/30/2012	2:28:31 PM	BCl3 MFC set to  0.000000
5/30/2012	2:28:31 PM	PH3 MFC set to  0.000000
5/30/2012	2:28:31 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:28:31 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:28:31 PM	Tube furnace set to 0
5/30/2012	2:29:37 PM	Helium valve closed
5/30/2012	2:29:37 PM	H2 valve closed
5/30/2012	2:29:37 PM	BCl3 valve closed
5/30/2012	2:29:37 PM	PH3 valve closed
5/30/2012	2:29:37 PM	SiCl4 pre valve closed
5/30/2012	2:29:37 PM	SiCl4 post valve closed
5/30/2012	2:29:37 PM	Main Vac valve closed
5/30/2012	2:29:37 PM	Bubbler valve closed
5/30/2012	2:29:37 PM	Bypass valve opened
5/30/2012	2:29:37 PM	Helium MFC set to  0.000000
5/30/2012	2:29:37 PM	H2 MFC set to  0.000000
5/30/2012	2:29:37 PM	BCl3 MFC set to  0.000000
5/30/2012	2:29:37 PM	PH3 MFC set to  0.000000
5/30/2012	2:29:37 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:29:37 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:29:37 PM	Tube furnace set to 0
5/30/2012	2:30:37 PM	Helium valve closed
5/30/2012	2:30:37 PM	H2 valve closed
5/30/2012	2:30:37 PM	BCl3 valve closed
5/30/2012	2:30:37 PM	PH3 valve closed
5/30/2012	2:30:37 PM	SiCl4 pre valve closed
5/30/2012	2:30:37 PM	SiCl4 post valve closed
5/30/2012	2:30:37 PM	Bypass valve closed
5/30/2012	2:30:37 PM	Bubbler valve closed
5/30/2012	2:30:37 PM	Main Vac valve opened
5/30/2012	2:30:37 PM	Helium MFC set to  0.000000
5/30/2012	2:30:37 PM	H2 MFC set to  0.000000
5/30/2012	2:30:37 PM	BCl3 MFC set to  0.000000
5/30/2012	2:30:37 PM	PH3 MFC set to  0.000000
5/30/2012	2:30:37 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:30:37 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:30:38 PM	Tube furnace set to 0
5/30/2012	2:30:39 PM	Run finished at 2:30 PM
5/30/2012	2:30:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2012	2:31:27 PM	Recipe started at 2:31 PM
5/30/2012	2:31:27 PM	Helium valve closed
5/30/2012	2:31:27 PM	H2 valve closed
5/30/2012	2:31:27 PM	BCl3 valve closed
5/30/2012	2:31:27 PM	PH3 valve closed
5/30/2012	2:31:27 PM	SiCl4 pre valve closed
5/30/2012	2:31:27 PM	SiCl4 post valve closed
5/30/2012	2:31:27 PM	Main Vac valve closed
5/30/2012	2:31:27 PM	Bypass valve closed
5/30/2012	2:31:27 PM	Bubbler valve closed
5/30/2012	2:31:27 PM	Helium MFC set to  0.000000
5/30/2012	2:31:27 PM	H2 MFC set to  0.000000
5/30/2012	2:31:27 PM	BCl3 MFC set to  0.000000
5/30/2012	2:31:27 PM	PH3 MFC set to  0.000000
5/30/2012	2:31:27 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:31:27 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:31:27 PM	Tube furnace set to 0
5/30/2012	2:31:30 PM	Helium valve closed
5/30/2012	2:31:30 PM	H2 valve closed
5/30/2012	2:31:30 PM	BCl3 valve closed
5/30/2012	2:31:30 PM	PH3 valve closed
5/30/2012	2:31:30 PM	SiCl4 pre valve closed
5/30/2012	2:31:30 PM	SiCl4 post valve closed
5/30/2012	2:31:30 PM	Main Vac valve closed
5/30/2012	2:31:30 PM	Bubbler valve closed
5/30/2012	2:31:30 PM	Bypass valve opened
5/30/2012	2:31:30 PM	Helium MFC set to  0.000000
5/30/2012	2:31:30 PM	H2 MFC set to  0.000000
5/30/2012	2:31:30 PM	BCl3 MFC set to  0.000000
5/30/2012	2:31:30 PM	PH3 MFC set to  0.000000
5/30/2012	2:31:30 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:31:30 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:31:30 PM	Tube furnace set to 0
5/30/2012	2:31:30 PM	Helium valve closed
5/30/2012	2:31:30 PM	H2 valve closed
5/30/2012	2:31:30 PM	BCl3 valve closed
5/30/2012	2:31:30 PM	PH3 valve closed
5/30/2012	2:31:30 PM	SiCl4 pre valve closed
5/30/2012	2:31:30 PM	SiCl4 post valve closed
5/30/2012	2:31:30 PM	Main Vac valve closed
5/30/2012	2:31:30 PM	Bubbler valve closed
5/30/2012	2:31:30 PM	Bypass valve opened
5/30/2012	2:31:30 PM	Helium MFC set to  0.000000
5/30/2012	2:31:30 PM	H2 MFC set to  0.000000
5/30/2012	2:31:30 PM	BCl3 MFC set to  0.000000
5/30/2012	2:31:30 PM	PH3 MFC set to  0.000000
5/30/2012	2:31:30 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:31:30 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:31:31 PM	Tube furnace set to 0
5/30/2012	2:31:39 PM	Helium valve closed
5/30/2012	2:31:39 PM	H2 valve closed
5/30/2012	2:31:39 PM	BCl3 valve closed
5/30/2012	2:31:39 PM	PH3 valve closed
5/30/2012	2:31:39 PM	SiCl4 pre valve closed
5/30/2012	2:31:39 PM	SiCl4 post valve closed
5/30/2012	2:31:39 PM	Bypass valve closed
5/30/2012	2:31:39 PM	Bubbler valve closed
5/30/2012	2:31:39 PM	Main Vac valve opened
5/30/2012	2:31:39 PM	Helium MFC set to  0.000000
5/30/2012	2:31:39 PM	H2 MFC set to  0.000000
5/30/2012	2:31:39 PM	BCl3 MFC set to  0.000000
5/30/2012	2:31:39 PM	PH3 MFC set to  0.000000
5/30/2012	2:31:39 PM	SiCl4 MFC set to  0.000000
5/30/2012	2:31:39 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	2:31:39 PM	Tube furnace set to 150
5/30/2012	3:32:16 PM	Helium valve closed
5/30/2012	3:32:16 PM	H2 valve closed
5/30/2012	3:32:16 PM	BCl3 valve closed
5/30/2012	3:32:16 PM	PH3 valve closed
5/30/2012	3:32:16 PM	SiCl4 pre valve closed
5/30/2012	3:32:16 PM	SiCl4 post valve closed
5/30/2012	3:32:16 PM	Bypass valve closed
5/30/2012	3:32:16 PM	Bubbler valve closed
5/30/2012	3:32:16 PM	Main Vac valve opened
5/30/2012	3:32:16 PM	Helium MFC set to  0.000000
5/30/2012	3:32:16 PM	H2 MFC set to  0.000000
5/30/2012	3:32:16 PM	BCl3 MFC set to  0.000000
5/30/2012	3:32:16 PM	PH3 MFC set to  0.000000
5/30/2012	3:32:16 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:32:16 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:32:17 PM	Tube furnace set to 0
5/30/2012	3:32:18 PM	Run finished at 3:32 PM
5/30/2012	3:32:20 PM	Main Vac valve closed
5/30/2012	3:32:33 PM	Main Vac valve opened
5/30/2012	3:32:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/30/2012	3:32:48 PM	Recipe started at 3:32 PM
5/30/2012	3:32:48 PM	Helium valve closed
5/30/2012	3:32:48 PM	H2 valve closed
5/30/2012	3:32:48 PM	BCl3 valve closed
5/30/2012	3:32:48 PM	PH3 valve closed
5/30/2012	3:32:48 PM	SiCl4 pre valve closed
5/30/2012	3:32:48 PM	SiCl4 post valve closed
5/30/2012	3:32:48 PM	Main Vac valve closed
5/30/2012	3:32:48 PM	Bubbler valve closed
5/30/2012	3:32:48 PM	Bypass valve opened
5/30/2012	3:32:48 PM	Helium MFC set to  0.000000
5/30/2012	3:32:48 PM	H2 MFC set to  0.000000
5/30/2012	3:32:48 PM	BCl3 MFC set to  0.000000
5/30/2012	3:32:48 PM	PH3 MFC set to  0.000000
5/30/2012	3:32:48 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:32:48 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:32:48 PM	Tube furnace set to 0
5/30/2012	3:32:48 PM	Helium valve closed
5/30/2012	3:32:48 PM	H2 valve closed
5/30/2012	3:32:48 PM	BCl3 valve closed
5/30/2012	3:32:48 PM	PH3 valve closed
5/30/2012	3:32:48 PM	SiCl4 pre valve closed
5/30/2012	3:32:48 PM	SiCl4 post valve closed
5/30/2012	3:32:48 PM	Main Vac valve closed
5/30/2012	3:32:48 PM	Bubbler valve closed
5/30/2012	3:32:48 PM	Bypass valve opened
5/30/2012	3:32:48 PM	Helium MFC set to  0.000000
5/30/2012	3:32:48 PM	H2 MFC set to  0.000000
5/30/2012	3:32:48 PM	BCl3 MFC set to  0.000000
5/30/2012	3:32:48 PM	PH3 MFC set to  0.000000
5/30/2012	3:32:48 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:32:48 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:32:49 PM	Tube furnace set to 0
5/30/2012	3:32:53 PM	Helium valve closed
5/30/2012	3:32:53 PM	H2 valve closed
5/30/2012	3:32:53 PM	BCl3 valve closed
5/30/2012	3:32:53 PM	PH3 valve closed
5/30/2012	3:32:53 PM	SiCl4 pre valve closed
5/30/2012	3:32:53 PM	SiCl4 post valve closed
5/30/2012	3:32:53 PM	Bypass valve closed
5/30/2012	3:32:53 PM	Bubbler valve closed
5/30/2012	3:32:53 PM	Main Vac valve opened
5/30/2012	3:32:53 PM	Helium MFC set to  0.000000
5/30/2012	3:32:53 PM	H2 MFC set to  0.000000
5/30/2012	3:32:53 PM	BCl3 MFC set to  0.000000
5/30/2012	3:32:53 PM	PH3 MFC set to  0.000000
5/30/2012	3:32:53 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:32:53 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:32:53 PM	Tube furnace set to 0
5/30/2012	3:32:55 PM	H2 valve closed
5/30/2012	3:32:55 PM	BCl3 valve closed
5/30/2012	3:32:55 PM	PH3 valve closed
5/30/2012	3:32:55 PM	SiCl4 pre valve closed
5/30/2012	3:32:55 PM	SiCl4 post valve closed
5/30/2012	3:32:55 PM	Bypass valve closed
5/30/2012	3:32:55 PM	Bubbler valve closed
5/30/2012	3:32:55 PM	Helium valve opened
5/30/2012	3:32:55 PM	Main Vac valve opened
5/30/2012	3:32:55 PM	Helium MFC set to  20.000000
5/30/2012	3:32:55 PM	H2 MFC set to  0.000000
5/30/2012	3:32:55 PM	BCl3 MFC set to  0.000000
5/30/2012	3:32:55 PM	PH3 MFC set to  0.000000
5/30/2012	3:32:55 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:32:55 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:32:56 PM	Tube furnace set to 0
5/30/2012	3:33:26 PM	Helium valve closed
5/30/2012	3:33:26 PM	H2 valve closed
5/30/2012	3:33:26 PM	BCl3 valve closed
5/30/2012	3:33:26 PM	PH3 valve closed
5/30/2012	3:33:26 PM	SiCl4 pre valve closed
5/30/2012	3:33:26 PM	SiCl4 post valve closed
5/30/2012	3:33:26 PM	Bypass valve closed
5/30/2012	3:33:26 PM	Bubbler valve closed
5/30/2012	3:33:26 PM	Main Vac valve opened
5/30/2012	3:33:26 PM	Helium MFC set to  0.000000
5/30/2012	3:33:26 PM	H2 MFC set to  0.000000
5/30/2012	3:33:26 PM	BCl3 MFC set to  0.000000
5/30/2012	3:33:26 PM	PH3 MFC set to  0.000000
5/30/2012	3:33:26 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:33:26 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:33:26 PM	Tube furnace set to 0
5/30/2012	3:33:56 PM	H2 valve closed
5/30/2012	3:33:56 PM	BCl3 valve closed
5/30/2012	3:33:56 PM	PH3 valve closed
5/30/2012	3:33:56 PM	SiCl4 pre valve closed
5/30/2012	3:33:56 PM	SiCl4 post valve closed
5/30/2012	3:33:56 PM	Bypass valve closed
5/30/2012	3:33:56 PM	Bubbler valve closed
5/30/2012	3:33:56 PM	Helium valve opened
5/30/2012	3:33:56 PM	Main Vac valve opened
5/30/2012	3:33:56 PM	Helium MFC set to  20.000000
5/30/2012	3:33:56 PM	H2 MFC set to  0.000000
5/30/2012	3:33:56 PM	BCl3 MFC set to  0.000000
5/30/2012	3:33:56 PM	PH3 MFC set to  0.000000
5/30/2012	3:33:56 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:33:56 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:33:56 PM	Tube furnace set to 0
5/30/2012	3:34:26 PM	Helium valve closed
5/30/2012	3:34:26 PM	H2 valve closed
5/30/2012	3:34:26 PM	BCl3 valve closed
5/30/2012	3:34:26 PM	PH3 valve closed
5/30/2012	3:34:26 PM	SiCl4 pre valve closed
5/30/2012	3:34:26 PM	SiCl4 post valve closed
5/30/2012	3:34:26 PM	Bypass valve closed
5/30/2012	3:34:26 PM	Bubbler valve closed
5/30/2012	3:34:26 PM	Main Vac valve opened
5/30/2012	3:34:26 PM	Helium MFC set to  0.000000
5/30/2012	3:34:26 PM	H2 MFC set to  0.000000
5/30/2012	3:34:26 PM	BCl3 MFC set to  0.000000
5/30/2012	3:34:26 PM	PH3 MFC set to  0.000000
5/30/2012	3:34:26 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:34:26 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:34:26 PM	Tube furnace set to 0
5/30/2012	3:34:56 PM	H2 valve closed
5/30/2012	3:34:56 PM	BCl3 valve closed
5/30/2012	3:34:56 PM	PH3 valve closed
5/30/2012	3:34:56 PM	SiCl4 pre valve closed
5/30/2012	3:34:56 PM	SiCl4 post valve closed
5/30/2012	3:34:56 PM	Bypass valve closed
5/30/2012	3:34:56 PM	Bubbler valve closed
5/30/2012	3:34:56 PM	Helium valve opened
5/30/2012	3:34:56 PM	Main Vac valve opened
5/30/2012	3:34:56 PM	Helium MFC set to  20.000000
5/30/2012	3:34:56 PM	H2 MFC set to  0.000000
5/30/2012	3:34:56 PM	BCl3 MFC set to  0.000000
5/30/2012	3:34:56 PM	PH3 MFC set to  0.000000
5/30/2012	3:34:56 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:34:56 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:34:57 PM	Tube furnace set to 0
5/30/2012	3:35:27 PM	Helium valve closed
5/30/2012	3:35:27 PM	H2 valve closed
5/30/2012	3:35:27 PM	BCl3 valve closed
5/30/2012	3:35:27 PM	PH3 valve closed
5/30/2012	3:35:27 PM	SiCl4 pre valve closed
5/30/2012	3:35:27 PM	SiCl4 post valve closed
5/30/2012	3:35:27 PM	Bypass valve closed
5/30/2012	3:35:27 PM	Bubbler valve closed
5/30/2012	3:35:27 PM	Main Vac valve opened
5/30/2012	3:35:27 PM	Helium MFC set to  0.000000
5/30/2012	3:35:27 PM	H2 MFC set to  0.000000
5/30/2012	3:35:27 PM	BCl3 MFC set to  0.000000
5/30/2012	3:35:27 PM	PH3 MFC set to  0.000000
5/30/2012	3:35:27 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:35:27 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:35:27 PM	Tube furnace set to 0
5/30/2012	3:35:57 PM	H2 valve closed
5/30/2012	3:35:57 PM	BCl3 valve closed
5/30/2012	3:35:57 PM	PH3 valve closed
5/30/2012	3:35:57 PM	SiCl4 pre valve closed
5/30/2012	3:35:57 PM	SiCl4 post valve closed
5/30/2012	3:35:57 PM	Bypass valve closed
5/30/2012	3:35:57 PM	Bubbler valve closed
5/30/2012	3:35:57 PM	Helium valve opened
5/30/2012	3:35:57 PM	Main Vac valve opened
5/30/2012	3:35:57 PM	Helium MFC set to  20.000000
5/30/2012	3:35:57 PM	H2 MFC set to  0.000000
5/30/2012	3:35:57 PM	BCl3 MFC set to  0.000000
5/30/2012	3:35:57 PM	PH3 MFC set to  0.000000
5/30/2012	3:35:57 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:35:57 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:35:57 PM	Tube furnace set to 0
5/30/2012	3:36:27 PM	Helium valve closed
5/30/2012	3:36:27 PM	H2 valve closed
5/30/2012	3:36:27 PM	BCl3 valve closed
5/30/2012	3:36:27 PM	PH3 valve closed
5/30/2012	3:36:27 PM	SiCl4 pre valve closed
5/30/2012	3:36:27 PM	SiCl4 post valve closed
5/30/2012	3:36:27 PM	Bypass valve closed
5/30/2012	3:36:27 PM	Bubbler valve closed
5/30/2012	3:36:27 PM	Main Vac valve opened
5/30/2012	3:36:27 PM	Helium MFC set to  0.000000
5/30/2012	3:36:27 PM	H2 MFC set to  0.000000
5/30/2012	3:36:27 PM	BCl3 MFC set to  0.000000
5/30/2012	3:36:27 PM	PH3 MFC set to  0.000000
5/30/2012	3:36:27 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:36:27 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:36:27 PM	Tube furnace set to 0
5/30/2012	3:36:57 PM	H2 valve closed
5/30/2012	3:36:57 PM	BCl3 valve closed
5/30/2012	3:36:57 PM	PH3 valve closed
5/30/2012	3:36:57 PM	SiCl4 pre valve closed
5/30/2012	3:36:57 PM	SiCl4 post valve closed
5/30/2012	3:36:57 PM	Bypass valve closed
5/30/2012	3:36:57 PM	Bubbler valve closed
5/30/2012	3:36:57 PM	Helium valve opened
5/30/2012	3:36:57 PM	Main Vac valve opened
5/30/2012	3:36:57 PM	Helium MFC set to  20.000000
5/30/2012	3:36:57 PM	H2 MFC set to  0.000000
5/30/2012	3:36:57 PM	BCl3 MFC set to  0.000000
5/30/2012	3:36:57 PM	PH3 MFC set to  0.000000
5/30/2012	3:36:57 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:36:57 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:36:57 PM	Tube furnace set to 0
5/30/2012	3:37:28 PM	Helium valve closed
5/30/2012	3:37:28 PM	H2 valve closed
5/30/2012	3:37:28 PM	BCl3 valve closed
5/30/2012	3:37:28 PM	PH3 valve closed
5/30/2012	3:37:28 PM	SiCl4 pre valve closed
5/30/2012	3:37:28 PM	SiCl4 post valve closed
5/30/2012	3:37:28 PM	Bypass valve closed
5/30/2012	3:37:28 PM	Bubbler valve closed
5/30/2012	3:37:28 PM	Main Vac valve opened
5/30/2012	3:37:28 PM	Helium MFC set to  0.000000
5/30/2012	3:37:28 PM	H2 MFC set to  0.000000
5/30/2012	3:37:28 PM	BCl3 MFC set to  0.000000
5/30/2012	3:37:28 PM	PH3 MFC set to  0.000000
5/30/2012	3:37:28 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:37:28 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:37:28 PM	Tube furnace set to 0
5/30/2012	3:37:58 PM	H2 valve closed
5/30/2012	3:37:58 PM	BCl3 valve closed
5/30/2012	3:37:58 PM	PH3 valve closed
5/30/2012	3:37:58 PM	SiCl4 pre valve closed
5/30/2012	3:37:58 PM	SiCl4 post valve closed
5/30/2012	3:37:58 PM	Bypass valve closed
5/30/2012	3:37:58 PM	Bubbler valve closed
5/30/2012	3:37:58 PM	Helium valve opened
5/30/2012	3:37:58 PM	Main Vac valve opened
5/30/2012	3:37:58 PM	Helium MFC set to  20.000000
5/30/2012	3:37:58 PM	H2 MFC set to  0.000000
5/30/2012	3:37:58 PM	BCl3 MFC set to  0.000000
5/30/2012	3:37:58 PM	PH3 MFC set to  0.000000
5/30/2012	3:37:58 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:37:58 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:37:58 PM	Tube furnace set to 0
5/30/2012	3:38:28 PM	Helium valve closed
5/30/2012	3:38:28 PM	H2 valve closed
5/30/2012	3:38:28 PM	BCl3 valve closed
5/30/2012	3:38:28 PM	PH3 valve closed
5/30/2012	3:38:28 PM	SiCl4 pre valve closed
5/30/2012	3:38:28 PM	SiCl4 post valve closed
5/30/2012	3:38:28 PM	Bypass valve closed
5/30/2012	3:38:28 PM	Bubbler valve closed
5/30/2012	3:38:28 PM	Main Vac valve opened
5/30/2012	3:38:28 PM	Helium MFC set to  0.000000
5/30/2012	3:38:28 PM	H2 MFC set to  0.000000
5/30/2012	3:38:28 PM	BCl3 MFC set to  0.000000
5/30/2012	3:38:28 PM	PH3 MFC set to  0.000000
5/30/2012	3:38:28 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:38:28 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:38:28 PM	Tube furnace set to 0
5/30/2012	3:38:58 PM	H2 valve closed
5/30/2012	3:38:58 PM	BCl3 valve closed
5/30/2012	3:38:58 PM	PH3 valve closed
5/30/2012	3:38:58 PM	SiCl4 pre valve closed
5/30/2012	3:38:58 PM	SiCl4 post valve closed
5/30/2012	3:38:58 PM	Bypass valve closed
5/30/2012	3:38:58 PM	Bubbler valve closed
5/30/2012	3:38:58 PM	Helium valve opened
5/30/2012	3:38:58 PM	Main Vac valve opened
5/30/2012	3:38:58 PM	Helium MFC set to  20.000000
5/30/2012	3:38:58 PM	H2 MFC set to  0.000000
5/30/2012	3:38:58 PM	BCl3 MFC set to  0.000000
5/30/2012	3:38:58 PM	PH3 MFC set to  0.000000
5/30/2012	3:38:58 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:38:58 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:38:58 PM	Tube furnace set to 0
5/30/2012	3:39:28 PM	Helium valve closed
5/30/2012	3:39:28 PM	H2 valve closed
5/30/2012	3:39:28 PM	BCl3 valve closed
5/30/2012	3:39:28 PM	PH3 valve closed
5/30/2012	3:39:28 PM	SiCl4 pre valve closed
5/30/2012	3:39:28 PM	SiCl4 post valve closed
5/30/2012	3:39:28 PM	Bypass valve closed
5/30/2012	3:39:28 PM	Bubbler valve closed
5/30/2012	3:39:28 PM	Main Vac valve opened
5/30/2012	3:39:28 PM	Helium MFC set to  0.000000
5/30/2012	3:39:28 PM	H2 MFC set to  0.000000
5/30/2012	3:39:28 PM	BCl3 MFC set to  0.000000
5/30/2012	3:39:28 PM	PH3 MFC set to  0.000000
5/30/2012	3:39:28 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:39:29 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:39:29 PM	Tube furnace set to 0
5/30/2012	3:39:59 PM	H2 valve closed
5/30/2012	3:39:59 PM	BCl3 valve closed
5/30/2012	3:39:59 PM	PH3 valve closed
5/30/2012	3:39:59 PM	SiCl4 pre valve closed
5/30/2012	3:39:59 PM	SiCl4 post valve closed
5/30/2012	3:39:59 PM	Bypass valve closed
5/30/2012	3:39:59 PM	Bubbler valve closed
5/30/2012	3:39:59 PM	Helium valve opened
5/30/2012	3:39:59 PM	Main Vac valve opened
5/30/2012	3:39:59 PM	Helium MFC set to  20.000000
5/30/2012	3:39:59 PM	H2 MFC set to  0.000000
5/30/2012	3:39:59 PM	BCl3 MFC set to  0.000000
5/30/2012	3:39:59 PM	PH3 MFC set to  0.000000
5/30/2012	3:39:59 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:39:59 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:39:59 PM	Tube furnace set to 0
5/30/2012	3:40:29 PM	Helium valve closed
5/30/2012	3:40:29 PM	H2 valve closed
5/30/2012	3:40:29 PM	BCl3 valve closed
5/30/2012	3:40:29 PM	PH3 valve closed
5/30/2012	3:40:29 PM	SiCl4 pre valve closed
5/30/2012	3:40:29 PM	SiCl4 post valve closed
5/30/2012	3:40:29 PM	Bypass valve closed
5/30/2012	3:40:29 PM	Bubbler valve closed
5/30/2012	3:40:29 PM	Main Vac valve opened
5/30/2012	3:40:29 PM	Helium MFC set to  0.000000
5/30/2012	3:40:29 PM	H2 MFC set to  0.000000
5/30/2012	3:40:29 PM	BCl3 MFC set to  0.000000
5/30/2012	3:40:29 PM	PH3 MFC set to  0.000000
5/30/2012	3:40:29 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:40:29 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:40:29 PM	Tube furnace set to 0
5/30/2012	3:40:59 PM	H2 valve closed
5/30/2012	3:40:59 PM	BCl3 valve closed
5/30/2012	3:40:59 PM	PH3 valve closed
5/30/2012	3:40:59 PM	SiCl4 pre valve closed
5/30/2012	3:40:59 PM	SiCl4 post valve closed
5/30/2012	3:40:59 PM	Bypass valve closed
5/30/2012	3:40:59 PM	Bubbler valve closed
5/30/2012	3:40:59 PM	Helium valve opened
5/30/2012	3:40:59 PM	Main Vac valve opened
5/30/2012	3:40:59 PM	Helium MFC set to  20.000000
5/30/2012	3:40:59 PM	H2 MFC set to  0.000000
5/30/2012	3:40:59 PM	BCl3 MFC set to  0.000000
5/30/2012	3:40:59 PM	PH3 MFC set to  0.000000
5/30/2012	3:40:59 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:40:59 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:40:59 PM	Tube furnace set to 0
5/30/2012	3:41:29 PM	Helium valve closed
5/30/2012	3:41:29 PM	H2 valve closed
5/30/2012	3:41:29 PM	BCl3 valve closed
5/30/2012	3:41:29 PM	PH3 valve closed
5/30/2012	3:41:29 PM	SiCl4 pre valve closed
5/30/2012	3:41:29 PM	SiCl4 post valve closed
5/30/2012	3:41:29 PM	Bypass valve closed
5/30/2012	3:41:29 PM	Bubbler valve closed
5/30/2012	3:41:29 PM	Main Vac valve opened
5/30/2012	3:41:29 PM	Helium MFC set to  0.000000
5/30/2012	3:41:29 PM	H2 MFC set to  0.000000
5/30/2012	3:41:29 PM	BCl3 MFC set to  0.000000
5/30/2012	3:41:29 PM	PH3 MFC set to  0.000000
5/30/2012	3:41:29 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:41:29 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:41:30 PM	Tube furnace set to 0
5/30/2012	3:42:00 PM	H2 valve closed
5/30/2012	3:42:00 PM	BCl3 valve closed
5/30/2012	3:42:00 PM	PH3 valve closed
5/30/2012	3:42:00 PM	SiCl4 pre valve closed
5/30/2012	3:42:00 PM	SiCl4 post valve closed
5/30/2012	3:42:00 PM	Bypass valve closed
5/30/2012	3:42:00 PM	Bubbler valve closed
5/30/2012	3:42:00 PM	Helium valve opened
5/30/2012	3:42:00 PM	Main Vac valve opened
5/30/2012	3:42:00 PM	Helium MFC set to  20.000000
5/30/2012	3:42:00 PM	H2 MFC set to  0.000000
5/30/2012	3:42:00 PM	BCl3 MFC set to  0.000000
5/30/2012	3:42:00 PM	PH3 MFC set to  0.000000
5/30/2012	3:42:00 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:42:00 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	3:42:00 PM	Tube furnace set to 0
5/30/2012	3:42:03 PM	Run aborted at 3:42 PM
5/30/2012	3:42:03 PM	Helium valve closed
5/30/2012	3:42:03 PM	H2 valve closed
5/30/2012	3:42:03 PM	BCl3 valve closed
5/30/2012	3:42:03 PM	PH3 valve closed
5/30/2012	3:42:03 PM	SiCl4 pre valve closed
5/30/2012	3:42:03 PM	SiCl4 post valve closed
5/30/2012	3:42:03 PM	Bypass valve closed
5/30/2012	3:42:03 PM	Main Vac valve closed
5/30/2012	3:42:03 PM	Bubbler valve closed
5/30/2012	3:42:03 PM	Helium MFC set to  0.000000
5/30/2012	3:42:03 PM	H2 MFC set to  0.000000
5/30/2012	3:42:03 PM	BCl3 MFC set to  0.000000
5/30/2012	3:42:03 PM	PH3 MFC set to  0.000000
5/30/2012	3:42:03 PM	SiCl4 MFC set to  0.000000
5/30/2012	3:42:04 PM	Tube furnace set to 0
5/30/2012	3:42:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/30/2012	3:42:05 PM	Main Vac valve opened
5/30/2012	3:42:38 PM	Main Vac valve closed
5/30/2012	3:42:48 PM	Main Vac valve opened
5/30/2012	3:43:31 PM	Main Vac valve closed
5/30/2012	3:43:52 PM	Main Vac valve opened
5/30/2012	4:06:04 PM	Main Vac valve closed
5/30/2012	4:06:11 PM	Main Vac valve opened
5/30/2012	4:06:20 PM	Main Vac valve closed
5/30/2012	4:06:33 PM	Main Vac valve opened
5/30/2012	4:06:52 PM	Recipe started at 4:06 PM
5/30/2012	4:06:52 PM	Helium valve closed
5/30/2012	4:06:52 PM	H2 valve closed
5/30/2012	4:06:52 PM	BCl3 valve closed
5/30/2012	4:06:52 PM	PH3 valve closed
5/30/2012	4:06:52 PM	SiCl4 pre valve closed
5/30/2012	4:06:52 PM	SiCl4 post valve closed
5/30/2012	4:06:52 PM	Main Vac valve closed
5/30/2012	4:06:52 PM	Bypass valve closed
5/30/2012	4:06:52 PM	Bubbler valve closed
5/30/2012	4:06:52 PM	Helium MFC set to  0.000000
5/30/2012	4:06:52 PM	H2 MFC set to  0.000000
5/30/2012	4:06:52 PM	BCl3 MFC set to  0.000000
5/30/2012	4:06:52 PM	PH3 MFC set to  0.000000
5/30/2012	4:06:52 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:06:52 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:06:53 PM	Tube furnace set to 0
5/30/2012	4:06:56 PM	Helium valve closed
5/30/2012	4:06:56 PM	BCl3 valve closed
5/30/2012	4:06:56 PM	PH3 valve closed
5/30/2012	4:06:56 PM	SiCl4 pre valve closed
5/30/2012	4:06:56 PM	SiCl4 post valve closed
5/30/2012	4:06:56 PM	Main Vac valve closed
5/30/2012	4:06:56 PM	Bypass valve closed
5/30/2012	4:06:56 PM	Bubbler valve closed
5/30/2012	4:06:56 PM	H2 valve opened
5/30/2012	4:06:56 PM	Helium MFC set to  0.000000
5/30/2012	4:06:56 PM	H2 MFC set to  500.000000
5/30/2012	4:06:56 PM	BCl3 MFC set to  0.000000
5/30/2012	4:06:56 PM	PH3 MFC set to  0.000000
5/30/2012	4:06:56 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:06:56 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:06:56 PM	Tube furnace set to 50
5/30/2012	4:08:08 PM	Helium valve closed
5/30/2012	4:08:08 PM	BCl3 valve closed
5/30/2012	4:08:08 PM	PH3 valve closed
5/30/2012	4:08:08 PM	SiCl4 pre valve closed
5/30/2012	4:08:08 PM	SiCl4 post valve closed
5/30/2012	4:08:08 PM	Main Vac valve closed
5/30/2012	4:08:08 PM	Bypass valve closed
5/30/2012	4:08:08 PM	H2 valve opened
5/30/2012	4:08:08 PM	Bubbler valve opened
5/30/2012	4:08:08 PM	Helium MFC set to  0.000000
5/30/2012	4:08:08 PM	H2 MFC set to  500.000000
5/30/2012	4:08:08 PM	BCl3 MFC set to  0.000000
5/30/2012	4:08:08 PM	PH3 MFC set to  0.000000
5/30/2012	4:08:08 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:08:08 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:08:08 PM	Tube furnace set to 50
5/30/2012	4:08:09 PM	Helium valve closed
5/30/2012	4:08:09 PM	BCl3 valve closed
5/30/2012	4:08:09 PM	PH3 valve closed
5/30/2012	4:08:09 PM	SiCl4 pre valve closed
5/30/2012	4:08:09 PM	SiCl4 post valve closed
5/30/2012	4:08:09 PM	Main Vac valve closed
5/30/2012	4:08:09 PM	Bypass valve closed
5/30/2012	4:08:09 PM	H2 valve opened
5/30/2012	4:08:09 PM	Bubbler valve opened
5/30/2012	4:08:09 PM	Helium MFC set to  0.000000
5/30/2012	4:08:09 PM	H2 MFC set to  500.000000
5/30/2012	4:08:09 PM	BCl3 MFC set to  0.000000
5/30/2012	4:08:09 PM	PH3 MFC set to  0.000000
5/30/2012	4:08:09 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:08:09 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:08:09 PM	Tube furnace set to 1000
5/30/2012	4:28:09 PM	Helium valve closed
5/30/2012	4:28:09 PM	BCl3 valve closed
5/30/2012	4:28:09 PM	Main Vac valve closed
5/30/2012	4:28:09 PM	Bypass valve closed
5/30/2012	4:28:09 PM	H2 valve opened
5/30/2012	4:28:09 PM	PH3 valve opened
5/30/2012	4:28:09 PM	SiCl4 pre valve opened
5/30/2012	4:28:09 PM	SiCl4 post valve opened
5/30/2012	4:28:09 PM	Bubbler valve opened
5/30/2012	4:28:09 PM	Helium MFC set to  0.000000
5/30/2012	4:28:09 PM	H2 MFC set to  500.000000
5/30/2012	4:28:09 PM	BCl3 MFC set to  0.000000
5/30/2012	4:28:09 PM	PH3 MFC set to  0.300000
5/30/2012	4:28:09 PM	SiCl4 MFC set to  50.000000
5/30/2012	4:28:09 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:28:09 PM	Tube furnace set to 1000
5/30/2012	4:48:09 PM	Helium valve closed
5/30/2012	4:48:09 PM	BCl3 valve closed
5/30/2012	4:48:09 PM	PH3 valve closed
5/30/2012	4:48:09 PM	SiCl4 pre valve closed
5/30/2012	4:48:09 PM	SiCl4 post valve closed
5/30/2012	4:48:09 PM	Main Vac valve closed
5/30/2012	4:48:09 PM	Bypass valve closed
5/30/2012	4:48:09 PM	H2 valve opened
5/30/2012	4:48:10 PM	Bubbler valve opened
5/30/2012	4:48:10 PM	Helium MFC set to  0.000000
5/30/2012	4:48:10 PM	H2 MFC set to  500.000000
5/30/2012	4:48:10 PM	BCl3 MFC set to  0.000000
5/30/2012	4:48:10 PM	PH3 MFC set to  0.000000
5/30/2012	4:48:10 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:48:10 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:48:10 PM	Tube furnace set to 950
5/30/2012	4:51:10 PM	H2 valve closed
5/30/2012	4:51:10 PM	BCl3 valve closed
5/30/2012	4:51:10 PM	PH3 valve closed
5/30/2012	4:51:10 PM	SiCl4 pre valve closed
5/30/2012	4:51:10 PM	SiCl4 post valve closed
5/30/2012	4:51:10 PM	Main Vac valve closed
5/30/2012	4:51:10 PM	Bypass valve closed
5/30/2012	4:51:10 PM	Helium valve opened
5/30/2012	4:51:10 PM	Bubbler valve opened
5/30/2012	4:51:10 PM	Helium MFC set to  500.000000
5/30/2012	4:51:10 PM	H2 MFC set to  0.000000
5/30/2012	4:51:10 PM	BCl3 MFC set to  0.000000
5/30/2012	4:51:10 PM	PH3 MFC set to  0.000000
5/30/2012	4:51:10 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:51:10 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:51:10 PM	Tube furnace set to 900
5/30/2012	4:54:10 PM	H2 valve closed
5/30/2012	4:54:10 PM	BCl3 valve closed
5/30/2012	4:54:10 PM	PH3 valve closed
5/30/2012	4:54:10 PM	SiCl4 pre valve closed
5/30/2012	4:54:10 PM	SiCl4 post valve closed
5/30/2012	4:54:10 PM	Main Vac valve closed
5/30/2012	4:54:10 PM	Bypass valve closed
5/30/2012	4:54:10 PM	Helium valve opened
5/30/2012	4:54:10 PM	Bubbler valve opened
5/30/2012	4:54:10 PM	Helium MFC set to  500.000000
5/30/2012	4:54:10 PM	H2 MFC set to  0.000000
5/30/2012	4:54:10 PM	BCl3 MFC set to  0.000000
5/30/2012	4:54:10 PM	PH3 MFC set to  0.000000
5/30/2012	4:54:10 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:54:10 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:54:10 PM	Tube furnace set to 850
5/30/2012	4:56:58 PM	H2 valve closed
5/30/2012	4:56:58 PM	BCl3 valve closed
5/30/2012	4:56:58 PM	PH3 valve closed
5/30/2012	4:56:58 PM	SiCl4 pre valve closed
5/30/2012	4:56:58 PM	SiCl4 post valve closed
5/30/2012	4:56:58 PM	Main Vac valve closed
5/30/2012	4:56:58 PM	Bypass valve closed
5/30/2012	4:56:58 PM	Helium valve opened
5/30/2012	4:56:58 PM	Bubbler valve opened
5/30/2012	4:56:58 PM	Helium MFC set to  500.000000
5/30/2012	4:56:58 PM	H2 MFC set to  0.000000
5/30/2012	4:56:58 PM	BCl3 MFC set to  0.000000
5/30/2012	4:56:58 PM	PH3 MFC set to  0.000000
5/30/2012	4:56:58 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:56:58 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:56:58 PM	Tube furnace set to 800
5/30/2012	4:56:59 PM	H2 valve closed
5/30/2012	4:56:59 PM	BCl3 valve closed
5/30/2012	4:56:59 PM	PH3 valve closed
5/30/2012	4:56:59 PM	SiCl4 pre valve closed
5/30/2012	4:56:59 PM	SiCl4 post valve closed
5/30/2012	4:56:59 PM	Main Vac valve closed
5/30/2012	4:56:59 PM	Bypass valve closed
5/30/2012	4:56:59 PM	Helium valve opened
5/30/2012	4:56:59 PM	Bubbler valve opened
5/30/2012	4:56:59 PM	Helium MFC set to  500.000000
5/30/2012	4:56:59 PM	H2 MFC set to  0.000000
5/30/2012	4:56:59 PM	BCl3 MFC set to  0.000000
5/30/2012	4:56:59 PM	PH3 MFC set to  0.000000
5/30/2012	4:56:59 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:56:59 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:57:00 PM	Tube furnace set to 750
5/30/2012	4:57:02 PM	H2 valve closed
5/30/2012	4:57:02 PM	BCl3 valve closed
5/30/2012	4:57:02 PM	PH3 valve closed
5/30/2012	4:57:02 PM	SiCl4 pre valve closed
5/30/2012	4:57:02 PM	SiCl4 post valve closed
5/30/2012	4:57:02 PM	Main Vac valve closed
5/30/2012	4:57:02 PM	Bypass valve closed
5/30/2012	4:57:02 PM	Helium valve opened
5/30/2012	4:57:02 PM	Bubbler valve opened
5/30/2012	4:57:02 PM	Helium MFC set to  500.000000
5/30/2012	4:57:02 PM	H2 MFC set to  0.000000
5/30/2012	4:57:02 PM	BCl3 MFC set to  0.000000
5/30/2012	4:57:02 PM	PH3 MFC set to  0.000000
5/30/2012	4:57:02 PM	SiCl4 MFC set to  0.000000
5/30/2012	4:57:02 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	4:57:03 PM	Tube furnace set to 0
5/30/2012	5:00:31 PM	Run aborted at 5:00 PM
5/30/2012	5:00:31 PM	Helium valve closed
5/30/2012	5:00:31 PM	H2 valve closed
5/30/2012	5:00:31 PM	BCl3 valve closed
5/30/2012	5:00:31 PM	PH3 valve closed
5/30/2012	5:00:31 PM	SiCl4 pre valve closed
5/30/2012	5:00:31 PM	SiCl4 post valve closed
5/30/2012	5:00:31 PM	Bypass valve closed
5/30/2012	5:00:31 PM	Main Vac valve closed
5/30/2012	5:00:31 PM	Bubbler valve closed
5/30/2012	5:00:31 PM	Helium MFC set to  0.000000
5/30/2012	5:00:31 PM	H2 MFC set to  0.000000
5/30/2012	5:00:31 PM	BCl3 MFC set to  0.000000
5/30/2012	5:00:31 PM	PH3 MFC set to  0.000000
5/30/2012	5:00:31 PM	SiCl4 MFC set to  0.000000
5/30/2012	5:00:32 PM	Tube furnace set to 0
5/30/2012	5:00:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2012	5:00:42 PM	Recipe started at 5:00 PM
5/30/2012	5:00:42 PM	Helium valve closed
5/30/2012	5:00:42 PM	H2 valve closed
5/30/2012	5:00:42 PM	BCl3 valve closed
5/30/2012	5:00:42 PM	PH3 valve closed
5/30/2012	5:00:42 PM	SiCl4 pre valve closed
5/30/2012	5:00:42 PM	SiCl4 post valve closed
5/30/2012	5:00:42 PM	Main Vac valve closed
5/30/2012	5:00:42 PM	Bypass valve closed
5/30/2012	5:00:42 PM	Bubbler valve closed
5/30/2012	5:00:42 PM	Helium MFC set to  0.000000
5/30/2012	5:00:42 PM	H2 MFC set to  0.000000
5/30/2012	5:00:42 PM	BCl3 MFC set to  0.000000
5/30/2012	5:00:42 PM	PH3 MFC set to  0.000000
5/30/2012	5:00:42 PM	SiCl4 MFC set to  0.000000
5/30/2012	5:00:42 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	5:00:42 PM	Tube furnace set to 0
5/30/2012	5:00:45 PM	H2 valve closed
5/30/2012	5:00:45 PM	BCl3 valve closed
5/30/2012	5:00:45 PM	PH3 valve closed
5/30/2012	5:00:45 PM	SiCl4 pre valve closed
5/30/2012	5:00:45 PM	SiCl4 post valve closed
5/30/2012	5:00:45 PM	Main Vac valve closed
5/30/2012	5:00:45 PM	Bypass valve closed
5/30/2012	5:00:45 PM	Bubbler valve closed
5/30/2012	5:00:45 PM	Helium valve opened
5/30/2012	5:00:45 PM	Helium MFC set to  500.000000
5/30/2012	5:00:45 PM	H2 MFC set to  0.000000
5/30/2012	5:00:45 PM	BCl3 MFC set to  0.000000
5/30/2012	5:00:45 PM	PH3 MFC set to  0.000000
5/30/2012	5:00:45 PM	SiCl4 MFC set to  0.000000
5/30/2012	5:00:45 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	5:00:45 PM	Tube furnace set to 0
5/30/2012	5:00:45 PM	Helium valve closed
5/30/2012	5:00:45 PM	H2 valve closed
5/30/2012	5:00:45 PM	BCl3 valve closed
5/30/2012	5:00:45 PM	PH3 valve closed
5/30/2012	5:00:45 PM	SiCl4 pre valve closed
5/30/2012	5:00:45 PM	SiCl4 post valve closed
5/30/2012	5:00:45 PM	Main Vac valve closed
5/30/2012	5:00:45 PM	Bypass valve closed
5/30/2012	5:00:45 PM	Bubbler valve closed
5/30/2012	5:00:45 PM	Helium MFC set to  0.000000
5/30/2012	5:00:45 PM	H2 MFC set to  0.000000
5/30/2012	5:00:45 PM	BCl3 MFC set to  0.000000
5/30/2012	5:00:45 PM	PH3 MFC set to  0.000000
5/30/2012	5:00:45 PM	SiCl4 MFC set to  0.000000
5/30/2012	5:00:45 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	5:00:46 PM	Tube furnace set to 0
5/30/2012	5:00:47 PM	Run finished at 5:00 PM
5/30/2012	5:00:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/30/2012	5:05:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/30/2012	5:05:20 PM	Recipe started at 5:05 PM
5/30/2012	5:05:20 PM	Helium valve closed
5/30/2012	5:05:20 PM	H2 valve closed
5/30/2012	5:05:20 PM	BCl3 valve closed
5/30/2012	5:05:20 PM	PH3 valve closed
5/30/2012	5:05:20 PM	SiCl4 pre valve closed
5/30/2012	5:05:20 PM	SiCl4 post valve closed
5/30/2012	5:05:20 PM	Main Vac valve closed
5/30/2012	5:05:20 PM	Bubbler valve closed
5/30/2012	5:05:20 PM	Bypass valve opened
5/30/2012	5:05:20 PM	Helium MFC set to  0.000000
5/30/2012	5:05:20 PM	H2 MFC set to  0.000000
5/30/2012	5:05:20 PM	BCl3 MFC set to  0.000000
5/30/2012	5:05:20 PM	PH3 MFC set to  0.000000
5/30/2012	5:05:20 PM	SiCl4 MFC set to  0.000000
5/30/2012	5:05:20 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	5:05:20 PM	Tube furnace set to 0
5/30/2012	5:06:25 PM	Helium valve closed
5/30/2012	5:06:25 PM	H2 valve closed
5/30/2012	5:06:25 PM	BCl3 valve closed
5/30/2012	5:06:25 PM	PH3 valve closed
5/30/2012	5:06:25 PM	SiCl4 pre valve closed
5/30/2012	5:06:25 PM	SiCl4 post valve closed
5/30/2012	5:06:25 PM	Main Vac valve closed
5/30/2012	5:06:25 PM	Bubbler valve closed
5/30/2012	5:06:25 PM	Bypass valve opened
5/30/2012	5:06:25 PM	Helium MFC set to  0.000000
5/30/2012	5:06:25 PM	H2 MFC set to  0.000000
5/30/2012	5:06:25 PM	BCl3 MFC set to  0.000000
5/30/2012	5:06:25 PM	PH3 MFC set to  0.000000
5/30/2012	5:06:25 PM	SiCl4 MFC set to  0.000000
5/30/2012	5:06:25 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	5:06:25 PM	Tube furnace set to 0
5/30/2012	5:07:25 PM	Helium valve closed
5/30/2012	5:07:25 PM	H2 valve closed
5/30/2012	5:07:25 PM	BCl3 valve closed
5/30/2012	5:07:25 PM	PH3 valve closed
5/30/2012	5:07:25 PM	SiCl4 pre valve closed
5/30/2012	5:07:25 PM	SiCl4 post valve closed
5/30/2012	5:07:25 PM	Bypass valve closed
5/30/2012	5:07:25 PM	Bubbler valve closed
5/30/2012	5:07:25 PM	Main Vac valve opened
5/30/2012	5:07:25 PM	Helium MFC set to  0.000000
5/30/2012	5:07:25 PM	H2 MFC set to  0.000000
5/30/2012	5:07:25 PM	BCl3 MFC set to  0.000000
5/30/2012	5:07:25 PM	PH3 MFC set to  0.000000
5/30/2012	5:07:25 PM	SiCl4 MFC set to  0.000000
5/30/2012	5:07:25 PM	Bypass solenoid MFC set to  0.000000
5/30/2012	5:07:25 PM	Tube furnace set to 0
5/30/2012	5:07:26 PM	Run finished at 5:07 PM
5/30/2012	5:07:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
